ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy |
Liu Cheng (刘诚)a b, Zhu Jian-Qiang (朱健强)a, John Rodenburgb |
a Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; b Department of Electronic and Electric Engineering, University of Sheffield, UK |
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Abstract While ptychography is an algorithm based on coherent illumination, satisfactory reconstructions can still be generated in most experiments, even though the radiation sources that are used are not ideally coherent. The underlying physics of this phenomenon is that the diffraction patterns of partially coherent illumination can be treated as those of purely coherent illumination by altering the intensities of the diffracted beams relative to their real values. On the other hand, due to the inconsistency in the altering interference among all the diffraction beams, noise/distortion is always involved in the reconstructed images. Furthermore, for a weak object, the noise/distortion in the reconstruction can be mostly reduced by using a highly curved beam for illumination in the data recording and forcing the dark field diffraction to be zero in the reconstruction.
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Received: 07 July 2014
Revised: 16 September 2014
Accepted manuscript online:
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PACS:
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42.30.Rx
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(Phase retrieval)
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42.25.Kb
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(Coherence)
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61.72.Ff
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(Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.))
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Corresponding Authors:
Liu Cheng
E-mail: chengliu@siom.ac.cn
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Cite this article:
Liu Cheng (刘诚), Zhu Jian-Qiang (朱健强), John Rodenburg Influence of the illumination coherency and illumination aperture on the ptychographic iterative microscopy 2015 Chin. Phys. B 24 024201
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