| ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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Non-contact angle measurement based on parallel multiplex laser feedback interferometry |
| Zhang Song (张松), Tan Yi-Dong (谈宜东), Zhang Shu-Lian (张书练) |
| State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China |
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Abstract We present a novel precise angle measurement scheme based on parallel multiplex laser feedback interferometry (PLFI), which outputs two parallel laser beams and thus their displacement difference reflects the angle variation of the target. Due to its ultrahigh sensitivity to the feedback light, PLFI realizes the direct non-contact measurement of non-cooperative targets. Experimental results show that PLFI has an accuracy of 8" within a range of 1400". The yaw of a guide is also measured and the experimental results agree with those of the dual-frequency laser interferometer Agilent 5529A.
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Received: 11 March 2014
Revised: 04 April 2014
Accepted manuscript online:
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PACS:
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42.62.Eh
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(Metrological applications; optical frequency synthesizers for precision spectroscopy)
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07.60.Ly
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(Interferometers)
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42.55.Xi
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(Diode-pumped lasers)
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| Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61036016). |
Corresponding Authors:
Zhang Shu-Lian
E-mail: zsl-dpi@mail.tsinghua.edu.cn
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Cite this article:
Zhang Song (张松), Tan Yi-Dong (谈宜东), Zhang Shu-Lian (张书练) Non-contact angle measurement based on parallel multiplex laser feedback interferometry 2014 Chin. Phys. B 23 114202
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