Effect of the nonlinearity of CCD in Fourier transform profilometry on spectrum overlapping and measurement accuracy

doi:10.1088/1674-1056/22/1/014203

Abstract In Fourier transform profilometry (FTP), we must restrain spectrum overlapping caused by the nonlinearity of charge coupled device (CCD) and increase the measurement accuracy of object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and simple physical explanation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the theory and method proposed.

Keywords: spectra overlapping measurement accuracy nonlinearity of CCD Fourier transform profilometry

Received: 30 May 2012
Revised: 15 June 2012
Accepted manuscript online:

PACS:	42.30.-d	(Imaging and optical processing)
	42.30.Kq	(Fourier optics)
	42.30.Wb	(Image reconstruction; tomography)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 61173122, 60970098, 60803024, 90715043, and 61144006) and the Postdoctoral Startup Foundation of Central South University, China (Grant No. 1332/74341016030).

Corresponding Authors: Zou Bei-Ji
E-mail: bjzou@vip.163.com

Cite this article:

Qiao Nao-Sheng (乔闹生), Zou Bei-Ji (邹北骥) Effect of the nonlinearity of CCD in Fourier transform profilometry on spectrum overlapping and measurement accuracy 2013 Chin. Phys. B 22 014203

[1]	Xu J L, Wang M, Pan H, Liu X H, Qi X L and Xu S X 2011 Acta Phys. Sin. 60 074210 (in Chinese)
[2]	Qiao N S, Cai X H and Yao C M 2009 Chin. Phys. B 18 4881
[3]	Cui S L, Tian F and Li D H 2012 Appl. Opt. 51 3194
[4]	Wen Y F, Li S K, Cheng H B, Su X Y and Zhang Q C 2010 Appl. Opt. 49 6563
[5]	Wang D J and Zhang T 2011 Chin. Phys. B 20 087202
[6]	Pei L, Liu G H, Ning T G, Gao S, Li J and Zhang Y J 2012 Acta Phys. Sin. 61 064203 (in Chinese)
[7]	Liu G H, Pei L, Ning T G, Gao S, Li J and Zhang Y J 2012 Acta Phys. Sin. 61 094205 (in Chinese)
[8]	Fan T Y, Xie L Y, Fan L and Wang Q Z 2011 Chin. Phys. B 20 076102
[9]	Lü C H, Fan H Y and Jiang N Q 2010 Chin. Phys. B 19 120303
[10]	Shi P, Cao G W and Li Y P 2010 Chin. Phys. B 19 074201
[11]	Takeda M and Mutoh K 1983 Appl. Opt. 22 3977
[12]	Chatterjee S and Kumar Y P 2011 Opt. Commun. 284 57
[13]	Stoykova E, Gotchev A and Sainov V 2011 Opt. Commun. 284 88
[14]	Yookas T and Lwaasa Y 1986 Appl. Opt. 25 1630
[15]	Qiao N S, Cai X H, Peng G H and Liu H Q 2006 J. Opt. Laser 17 1339 (in Chinese)
[16]	Chen W J, Li M H and Su X Y 2009 Optik. 120 652

[1]	Theoretical description of improving measurement accuracy for incoherence Mie Doppler wind lidar Du Jun (杜军), Ren De-Ming (任德明), Zhao Wei-Jiang (赵卫疆), Qu Yan-Chen (曲彦臣), Chen Zhen-Lei (陈振雷), Geng Li-Jie (耿利杰 ). Chin. Phys. B, 2013, 22(2): 024211.
[2]	Measurement of a discontinuous object based on a dual-frequency grating Qiao Nao-Sheng(乔闹生),Cai Xin-Hua(蔡新华), and Yao Chun-Mei(姚春梅) . Chin. Phys. B, 2009, 18(11): 4881-4886.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Effect of the nonlinearity of CCD in Fourier transform profilometry on spectrum overlapping and measurement accuracy

Cite this article:

Online attention