SCANNING AUGER ELECTRON SPECTROSCOPIC INVESTIGATIONS OF MAGNETOSTRICTIVE NANOSCALE MULTILAYERS
Eberhard Nolda, Christel Adelhelma, Alfred Ludwigb, Shen Dian-hong (沈电洪)c
a Forschungszentrum Karlsruhe GmbH,Institut für Materialforschung, 1, Postfach, 3640, D-76021 Karlsruhe, FRG; b Center of Advanced European Studies and Research, Friedensplatz 16, D-53111 Bonn, FRG; c Institute of Physics, Chinese Academy of Sciences, Beiing 100080, China
Abstract The characterisation of thin magnetostrictive multilayers in the nanometerscale range [(4,5nmTb40Fe60/9nmFe)×100] demands a surface sensitive analytical technique. A suitable technique is scanning Auger Electron Spectroscopy (AES) to determine the elemental composition, the thickness, the presence of interdiffusion between thin layers, or the presence of contamination at interfaces.Auger sputter depth profiles are obtained by using Xe-Ion bombardment to etch the sample.Sample rotation during sputtering produces shallow craters, minimises roughening and enhances depth resolution. In addition, Auger maps of the craters are used to reveal the separated magnetostrictive Tb40Fe60 layers and soft magnetic Fe layers.
Received: 05 March 2001
Accepted manuscript online:
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