Abstract Based on a surface reaction mechanism for diamond deposition from the gas phase, a kinetic model is developed to describe diamond nucleation sites and the initial stage of diamond growth in chemical vapor deposition. The timein dependent solutions to the rate equations, which describe the steady-state growth of diamond films, is obtained analytically for the case of small ratio of car bon flux to atomic hydrogen flux. The time-dependent solutions obtained by nume rical methods for large ratio of carbon to atomic hydrogen flux describe the nucleation and initial gorwth stage of diamond films. This model suggests some general predictions for diamond nucleation and growth and can be used to explain several important experimental phenomena observed by others.
Fund: Project supported by the Natural Science Foundation of Hunan Province, China.
Cite this article:
LIU QIU-XIANG (刘秋香), WANG JIN-BIN (王金斌), YANG GUO-WEI (杨国伟), YOU JIAN-QIANG (游建强) A KINETIC MODEL FOR THE INITIAL GROWTH OF DIAMOND FILMS 1998 Acta Physica Sinica (Overseas Edition) 7 379
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Electroluminescence of double-doped diamond thin films Zhang Shi(章诗), Wang Xiao-Ping(王小平), Wang Li-Jun(王丽军), Zhu Yu-Zhuan(朱玉传), Mei Cui-Yu(梅翠玉), Liu Xin-Xin(刘欣欣), Li Huai-Hui(李怀辉), and Gu Ying-Zhan(顾应展). Chin. Phys. B, 2010, 19(9): 097805.
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