Differential nonlinear photocarrier radiometry for characterizing ultra-low energy boron implantation in silicon

doi:10.1088/1674-1056/ac1efe

Abstract The measuring of the depth profile and electrical activity of implantation impurity in the top nanometer range of silicon encounters various difficulties and limitations, though it is known to be critical in fabrication of silicon complementary metal-oxide-semiconductor (CMOS) devices. In the present work, SRIM program and photocarrier radiometry (PCR) are employed to monitor the boron implantation in industrial-grade silicon in an ultra-low implantation energy range from 0.5 keV to 5 keV. The differential PCR technique, which is improved by greatly shortening the measurement time through the simplification of reference sample, is used to investigate the effects of implantation energy on the frequency behavior of the PCR signal for ultra-shallow junction. The transport parameters and thickness of shallow junction, extracted via multi-parameter fitting the dependence of differential PCR signal on modulation frequency to the corresponding theoretical model, well explain the energy dependence of PCR signal and further quantitatively characterize the recovery degree of structure damage induced by ion implantation and the electrical activation degree of impurities. The monitoring of nm-level thickness and electronic properties exhibits high sensitivity and apparent monotonicity over the industrially relevant implantation energy range. The depth profiles of implantation boron in silicon with the typical electrical damage threshold (Y_ED) of 5.3×10¹⁵ cm^-3 are evaluated by the SRIM program, and the determined thickness values are consistent well with those extracted by the differential PCR. It is demonstrated that the SRIM and the PCR are both effective tools to characterize ultra-low energy ion implantation in silicon.

Keywords: ultra-low energy ion implantation differential nonlinear photocarrier radiometry junction depth electronic transport parameters

Received: 27 May 2021
Revised: 09 August 2021
Accepted manuscript online: 19 August 2021

PACS:	81.70.Fy	(Nondestructive testing: optical methods)
	68.55.Ln	(Defects and impurities: doping, implantation, distribution, concentration, etc.)
	73.50.Gr	(Charge carriers: generation, recombination, lifetime, trapping, mean free paths)
	78.56.Cd	(Photocarrier radiometry)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 61771103, 61704023, and 61601092).

Corresponding Authors: Bin-Cheng Li
E-mail: bcli@uestc.edu.cn

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Xiao-Ke Lei(雷晓轲), Bin-Cheng Li(李斌成), Qi-Ming Sun(孙启明), Jing Wang(王静), Chun-Ming Gao(高椿明), and Ya-Fei Wang(王亚非) Differential nonlinear photocarrier radiometry for characterizing ultra-low energy boron implantation in silicon 2022 Chin. Phys. B 31 038102

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Differential nonlinear photocarrier radiometry for characterizing ultra-low energy boron implantation in silicon

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