Fabrication of pillar-array superhydrophobic silicon surface and thermodynamic analysis on the wetting state transition

doi:10.1088/1674-1056/22/10/106801

Abstract Textured silicon (Si) substrates decorated with regular microscale square pillar arrays of nearly the same side length, height, but different intervals are fabricated by inductively coupled plasma, and then silanized by self-assembly octadecyltrichlorosilane (OTS) film. The systematic water contact angle (CA) measurements and micro/nanoscale hierarchical rough structure models are used to analyze the wetting behaviors of original and silanized textured Si substrates each as a function of pillar interval-to-width ratio. On the original textured Si substrate with hydrophilic pillars, the water droplet possesses a larger apparent CAs (>90°) and contact angle hysteresis (CAH), induced by the hierarchical roughness of microscale pillar arrays and nanoscale pit-like roughness. However, the silanized textured substrate shows superhydrophobicity induced by the low free energy OTS overcoat and the hierarchical roughness of microscale pillar arrays, and nanoscale island-like roughness. The largest apparent CA on the superhydrophobic surface is 169.8°. In addition, the wetting transition of a gently deposited water droplet is observed on the original textured substrate with pillar interval-to-width ratio increasing. Furthermore, the wetting state transition is analyzed by thermodynamic approach with the consideration of the CAH effect. The results indicate that the wetting state changed from a Cassie state to a pseudo-Wenzel during the transition.

Keywords: superhydrophobicity wetting state transition textured silicon substrate thermodynamic method

Received: 11 November 2012
Revised: 03 May 2013
Accepted manuscript online:

PACS:	68.08.Bc	(Wetting)
	68.35.Md	(Surface thermodynamics, surface energies)
	81.16.Rf	(Micro- and nanoscale pattern formation)
	81.16.Dn	(Self-assembly)

Fund: Project supported by the Program for New Century Excellent Talents in University of Ministry of Education of China (Grant No. NCET-09-0211) and the Fundamental Research Funds for the Central Universities (Grant Nos. 2012YJS105 and M13JB00240).

Corresponding Authors: Zhang Chao-Hui
E-mail: zhhzhang@bjtu.edu.cn

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Liu Si-Si (刘思思), Zhang Chao-Hui (张朝辉), Zhang Han-Bing (张寒冰), Zhou Jie (周杰), He Jian-Guo (何建国), Yin Heng-Yang (尹恒洋) Fabrication of pillar-array superhydrophobic silicon surface and thermodynamic analysis on the wetting state transition 2013 Chin. Phys. B 22 106801

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Fabrication of pillar-array superhydrophobic silicon surface and thermodynamic analysis on the wetting state transition

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