CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES |
Prev
Next
|
|
|
Fabrication processing effects on microstructure and morphology of erbium film |
Shen Hua-Hai(申华海)a), Peng Shu-Ming(彭述明)b), Long Xing-Gui(龙兴贵)b), Zhou Xiao-Song(周晓松)b), Yang Li(杨莉)a), Liu Jin-Hua(刘锦华)b), Sun Qing-Qiang(孙庆强) a), and Zu Xiao-Tao(祖小涛)a)† |
a Department of Applied Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; b Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China |
|
|
Abstract The effects of substrate temperature on the microstructure and the morphology of erbium film are systematically investigated by using X-ray diffraction (XRD) and scanning electron microscopy (SEM). All the erbium films are grown by the electron-beam vapor deposition (EBVD). A novel preparation method for observing the cross-section morphology of the erbium film is developed. The films deposited at 200 ℃ have (002) preferred orientation, and the films deposited at 450 ℃ have mixed (100) and (101) texture, which are due to the different growth mechanisms of surface energy minimization and recrystallization, respectively. The peak positions and the full widths at half maximum (FWHMs) of erbium diffraction lines (100), (002), and (101) shift towards higher angles and decrease with the increasing substrate temperature in a largely uniform manner, respectively. Also, the lattice constants decrease with the increasing temperature. The transition in the film stresses can be used to interpret the changes in peak positions, FWHMs, and lattice constants. The stress is compressive for the as-growth films, and is counteracted by the tensile stress formed during the process of temperature cooling down to room temperature. The tensile stress mainly originates from the difference in the coefficients of thermal expansion of substrate--film couple.
|
Received: 29 September 2011
Revised: 26 February 2012
Accepted manuscript online:
|
PACS:
|
61.05.-a
|
(Techniques for structure determination)
|
|
81.10.Jt
|
(Growth from solid phases (including multiphase diffusion and recrystallization))
|
|
81.10.-h
|
(Methods of crystal growth; physics and chemistry of crystal growth, crystal morphology, and orientation)
|
|
81.15.Jj
|
(Ion and electron beam-assisted deposition; ion plating)
|
|
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 10976007), the Fundamental Research Funds for the Central Universities, China (Grant No. ZYGX2009J040), the Science and Technology Foundation of CAEP, China (Grant No. 2009A0301015), and the Major Program of the National Natural Science Foundation of China (Grant No. 91126001). |
Corresponding Authors:
Zu Xiao-Tao
E-mail: xtzu@uestc.edu.cn
|
Cite this article:
Shen Hua-Hai(申华海), Peng Shu-Ming(彭述明), Long Xing-Gui(龙兴贵), Zhou Xiao-Song(周晓松), Yang Li(杨莉), Liu Jin-Hua(刘锦华), Sun Qing-Qiang(孙庆强), and Zu Xiao-Tao(祖小涛) Fabrication processing effects on microstructure and morphology of erbium film 2012 Chin. Phys. B 21 076101
|
[1] |
Yang L, Peng S M, Long X G, Gao F, Heinisch H L, Kurtz R J and Zu X T 2010 J. Appl. Phys. 107 054903
|
[2] |
Brumbach M T, Ohlhausen J A, Zavadil K R, Snow C S and Woicik J C 2011 J. Appl. Phys. 109 114911
|
[3] |
Knapp J A, Browning J F and Bond G M 2010 Nucl. Instrum. Meth. B 268 2141
|
[4] |
Gu E D, Savaloni H, Player M A and Marr G V 1992 J. Phys. Chem. Solids 53 127
|
[5] |
Bond G M, Browning J F and Snow C S 2010 J. Appl. Phys. 107 083514
|
[6] |
Ferrizz R M 2006 Erbium Hydride Decomposition Kinetics, Sandia Report, SAND2006-7014
|
[7] |
Knapp J A, Browning J F and Bond G M 2009 J. Appl. Phys. 105 053501
|
[8] |
Dow P A, Briers G W, Dewey M A P and Stark D S 1968 Nucl. Instrum. Meth. 60 293
|
[9] |
Graves E R, Rodrigues A A, Goldblatt M and Meyer D I 1949 Rev. Sci. Inst. 20 579
|
[10] |
Redstone R and Rowland M C 1964 Nature 201 1115
|
[11] |
Gabis I, Evard E, Voyt A, Chernov I and Zaika Y 2003 J. Alloys Comp. 356--357 353
|
[12] |
Ferrizz R M 2007 Erbium Hydride Thermal Desorption: Controlling Kinetics, Sandia Report, SAND2007-2659
|
[13] |
Jones P M S, Ellis P and Aslett T 1969 Nature 223 829
|
[14] |
Dai W, Luo J S, Tang Y J, Wang C Y, Chen S J and Sun W G 2009 Acta Phys. Sin. 58 1890 (in Chinese)
|
[15] |
Venhaus T and Poths J 2005 Fusion Sci. Technol. 7th International Conference on Tritium Science and Technology 48 601
|
[16] |
Beavis L C and Kass W J 1977 J. Vac. Sci. Technol. 14 509
|
[17] |
Savaloni H, Player M A, Gu E and Marr G V 1992 Vacuum 43 965
|
[18] |
Savaloni H and Player M A 1995 Vacuum 46 167
|
[19] |
Wang J X, Qin Y L, Yan H Q, Gao P Q, Li J S, Yin M and He D Y 2009 Chin. Phys. B 18 773
|
[20] |
Parish C M, Snow C S, Kammler D R and Brewer L N 2010 J. Nucl. Mater. 403 191
|
[21] |
Grovenor C R M, Hentzell H T G and Smith D A 1984 Acta Metall. 32 773
|
[22] |
Lundin C E 1968 Trans. Met. Soc. AIME 242 1161
|
[23] |
Zhou M, Nose M, Makino Y and Nogi K 2000 Thin Solid Films 359 165
|
[24] |
Pang X L, Yang H S, Liu X L, Gao K W, Wang Y B, Volinsky A A and Levin A A 2011 Thin Solid Films 519 5831
|
[25] |
Zhang J M, Wang D D and Xu K W 2006 Appl. Surf. Sci. 253 2018
|
[26] |
Dhesi S S, White R G, Patchett A J, Lee M H, Blyth R I R, Leibsle F M and Barrett S D 1995 Phys. Rev. B 51 17946
|
[27] |
Lee D N 2000 Int. J. Mech. Sci. 42 1645
|
[28] |
Yuan Z J, Zhu X M, Wang X, Cai X K, Zhang B P, Qiu D J and Wu H Z 2011 Thin Solid Films 519 3254
|
[29] |
D'Heurle F M 1970 Metall. Trans. 1 725
|
[30] |
Chason E, Sheldon B W, Freund L B, Floro J A and Hearne S J 2002 Phys. Rev. Lett. 88 6013
|
[31] |
Speight J G 2005 Lange's Handbook of Chemistry (16th edn.) (New York: McGraw-Hill)
|
[32] |
Adams D P, Romero J A, Rodriguez M A, Floro J A and Kotula P G 2002 Microstructure, Phase Formation, and Stress of Reactively-Deposited Metal Hydride Thin Films, Sandia Report, SAND2002-1466
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|