中国物理B ›› 2025, Vol. 34 ›› Issue (6): 68501-068501.doi: 10.1088/1674-1056/adc40b

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A high-sensitivity deep-junction single-photon detector for near-infrared imaging

Yuanhao Bi(毕元昊)1, Dajing Bian(卞大井)1, Ming Li(李铭)1, and Yue Xu(徐跃)1,2,†   

  1. 1 College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China;
    2 National and Local Joint Engineering Laboratory of RF Integration & Micro-Assembly Technology, Nanjing 210023, China
  • 收稿日期:2025-02-25 修回日期:2025-03-10 接受日期:2025-03-24 出版日期:2025-05-16 发布日期:2025-06-05
  • 通讯作者: Yue Xu E-mail:yuex@njupt.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 62171233), the Natural Science Foundation of Jiangsu Province, China (Grant No. BK20241891), and the Jiangsu Province Postgraduate Innovation Program (Grant No. KYCX23_0999).

A high-sensitivity deep-junction single-photon detector for near-infrared imaging

Yuanhao Bi(毕元昊)1, Dajing Bian(卞大井)1, Ming Li(李铭)1, and Yue Xu(徐跃)1,2,†   

  1. 1 College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China;
    2 National and Local Joint Engineering Laboratory of RF Integration & Micro-Assembly Technology, Nanjing 210023, China
  • Received:2025-02-25 Revised:2025-03-10 Accepted:2025-03-24 Online:2025-05-16 Published:2025-06-05
  • Contact: Yue Xu E-mail:yuex@njupt.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 62171233), the Natural Science Foundation of Jiangsu Province, China (Grant No. BK20241891), and the Jiangsu Province Postgraduate Innovation Program (Grant No. KYCX23_0999).

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摘要： A near-infrared (NIR) enhanced silicon single-photon avalanche diode (SPAD) detector is proposed using 0.18 μm bipolar-CMOS-DMOS technology. It is based on a deep multiplication region, formed by a junction between the high-voltage P-well (HVPW) and high-voltage buried N$+$ layer, to enhance the NIR photon detection probability (PDP). Thanks to the lightly doped P-type epitaxial layer, the electric field in the guard ring is reduced and premature breakdown is prevented. In particular, an extra P-type implantation layer (PIL) is added to the HVPW to reduce the breakdown voltage and enhance the device's sensitivity. Further research on the impact of different PIL sizes on the device performance is carried out. It is experimentally shown that at an excess bias voltage of 5 V, the optimized SPAD achieves a dark count rate of 0.64 cps/μm$^2$, peak PDP of 54.8% at 555 nm and PDP of 10.53% at 905 nm. The full width at half-maximum of the timing jitter is 285 ps, and the afterpulsing probability is lower than 1.17%. This novel device provides a practical, low-cost solution for high-performance NIR time-of-flight detectors and 3D imaging sensors.

关键词: single-photon avalanche diode (SPAD), near-infrared (NIR) enhancement, photon detection probability (PDP), dark count rate (DCR), time-of-flight (ToF)

Abstract: A near-infrared (NIR) enhanced silicon single-photon avalanche diode (SPAD) detector is proposed using 0.18 μm bipolar-CMOS-DMOS technology. It is based on a deep multiplication region, formed by a junction between the high-voltage P-well (HVPW) and high-voltage buried N$+$ layer, to enhance the NIR photon detection probability (PDP). Thanks to the lightly doped P-type epitaxial layer, the electric field in the guard ring is reduced and premature breakdown is prevented. In particular, an extra P-type implantation layer (PIL) is added to the HVPW to reduce the breakdown voltage and enhance the device's sensitivity. Further research on the impact of different PIL sizes on the device performance is carried out. It is experimentally shown that at an excess bias voltage of 5 V, the optimized SPAD achieves a dark count rate of 0.64 cps/μm$^2$, peak PDP of 54.8% at 555 nm and PDP of 10.53% at 905 nm. The full width at half-maximum of the timing jitter is 285 ps, and the afterpulsing probability is lower than 1.17%. This novel device provides a practical, low-cost solution for high-performance NIR time-of-flight detectors and 3D imaging sensors.

Key words: single-photon avalanche diode (SPAD), near-infrared (NIR) enhancement, photon detection probability (PDP), dark count rate (DCR), time-of-flight (ToF)

中图分类号:  (Semiconductor-device characterization, design, and modeling)

  • 85.30.De
85.60.Dw (Photodiodes; phototransistors; photoresistors) 85.60.Gz (Photodetectors (including infrared and CCD detectors)) 42.79.Pw (Imaging detectors and sensors)