中国物理B ›› 2019, Vol. 28 ›› Issue (7): 77901-077901.doi: 10.1088/1674-1056/28/7/077901

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Secondary electron yield suppression using millimeter-scale pillar array and explanation of the abnormal yield-energy curve

Ming Ye(叶鸣), Peng Feng(冯鹏), Dan Wang(王丹), Bai-Peng Song(宋佰鹏), Yong-Ning He(贺永宁), Wan-Zhao Cui(崔万照)   

  1. 1 School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
    2 Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
    3 State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
    4 National Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology, Xi'an 710100, China
  • 收稿日期:2019-02-13 修回日期:2019-04-22 出版日期:2019-07-05 发布日期:2019-07-05
  • 通讯作者: Ming Ye, Yong-Ning He E-mail:yeming057@xjtu.edu.cn;yongning@xjtu.edu.cn
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant Nos. U1832190, 61501364, U1537211, and 11705142).

Secondary electron yield suppression using millimeter-scale pillar array and explanation of the abnormal yield-energy curve

Ming Ye(叶鸣)1,2, Peng Feng(冯鹏)1, Dan Wang(王丹)1, Bai-Peng Song(宋佰鹏)3, Yong-Ning He(贺永宁)1, Wan-Zhao Cui(崔万照)4   

  1. 1 School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
    2 Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
    3 State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
    4 National Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology, Xi'an 710100, China
  • Received:2019-02-13 Revised:2019-04-22 Online:2019-07-05 Published:2019-07-05
  • Contact: Ming Ye, Yong-Ning He E-mail:yeming057@xjtu.edu.cn;yongning@xjtu.edu.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant Nos. U1832190, 61501364, U1537211, and 11705142).

摘要:

The phenomenon of secondary electron emission is of considerable interest in areas such as particle accelerators and on-board radio frequency (RF) components. Total secondary electron yield (TSEY) is a parameter that is frequently used to describe the secondary electron emission capability of a material. It has been widely recognized that the TSEY vs. primary electron energy curve has a single-hump shape. However, the TSEY-energy curve with a double-hump shape was also observed experimentally–this anomaly still lacks explanation. In this work, we explain this anomaly with the help of a millimetre-scale (mm-scale) silver pillar array fabricated by three-dimensional (3D) printing technology. The TSEY-energy curve of this pillar array as well as its flat counterpart is obtained using sample current method. The measurement results show that for the considered primary electron energy (40-1500 eV), the pillar array can obviously suppress TSEY, and its TSEY-energy curve has an obvious double-hump shape. Through Monte Carlo simulations and electron beam spot size measurements, we successfully attribute the double-hump effect to the dependence of electron beam spot size on the primary electron energy. The observations of this work may be of help in determining the TSEY of roughened surface with characteristic surface structures comparable to electron beam spot size. It also experimentally confirms the TSEY suppression effect of pillar arrays.

关键词: secondary electron emission, pillar array, total secondary electron yield suppression

Abstract:

The phenomenon of secondary electron emission is of considerable interest in areas such as particle accelerators and on-board radio frequency (RF) components. Total secondary electron yield (TSEY) is a parameter that is frequently used to describe the secondary electron emission capability of a material. It has been widely recognized that the TSEY vs. primary electron energy curve has a single-hump shape. However, the TSEY-energy curve with a double-hump shape was also observed experimentally–this anomaly still lacks explanation. In this work, we explain this anomaly with the help of a millimetre-scale (mm-scale) silver pillar array fabricated by three-dimensional (3D) printing technology. The TSEY-energy curve of this pillar array as well as its flat counterpart is obtained using sample current method. The measurement results show that for the considered primary electron energy (40-1500 eV), the pillar array can obviously suppress TSEY, and its TSEY-energy curve has an obvious double-hump shape. Through Monte Carlo simulations and electron beam spot size measurements, we successfully attribute the double-hump effect to the dependence of electron beam spot size on the primary electron energy. The observations of this work may be of help in determining the TSEY of roughened surface with characteristic surface structures comparable to electron beam spot size. It also experimentally confirms the TSEY suppression effect of pillar arrays.

Key words: secondary electron emission, pillar array, total secondary electron yield suppression

中图分类号:  (Electron impact: secondary emission)

  • 79.20.Hx
29.20.-c (Accelerators)