中国物理B ›› 2019, Vol. 28 ›› Issue (2): 25202-025202.doi: 10.1088/1674-1056/28/2/025202

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Effects of secondary electron emission on plasma characteristics in dual-frequency atmospheric pressure helium discharge by fluid modeling

Yi-Nan Wang(王一男), Shuai-Xing Li(李帅星), Yue Liu(刘悦), Li Wang(王莉)   

  1. 1 College of Science, Liaoning Shihua University, Fushun 113001, China;
    2 Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), Dalian University of Technology, Dalian 116024, China
  • 收稿日期:2018-10-09 修回日期:2018-12-02 出版日期:2019-02-05 发布日期:2019-02-05
  • 通讯作者: Yue Liu E-mail:liuyue@dlut.edu.cn
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant No. 11505089).

Effects of secondary electron emission on plasma characteristics in dual-frequency atmospheric pressure helium discharge by fluid modeling

Yi-Nan Wang(王一男)1, Shuai-Xing Li(李帅星)1, Yue Liu(刘悦)2, Li Wang(王莉)1   

  1. 1 College of Science, Liaoning Shihua University, Fushun 113001, China;
    2 Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), Dalian University of Technology, Dalian 116024, China
  • Received:2018-10-09 Revised:2018-12-02 Online:2019-02-05 Published:2019-02-05
  • Contact: Yue Liu E-mail:liuyue@dlut.edu.cn
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant No. 11505089).

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摘要：

A one-dimensional (1D) fluid simulation of dual frequency discharge in helium gas at atmospheric pressure is carried out to investigate the role of the secondary electron emission on the surfaces of the electrodes. In the simulation, electrons, ions of He+ and He2+, metastable atoms of Heast and metastable molecules of He2* are included. It is found that the secondary electron emission coefficient significantly influences plasma density and electric field as well as electron heating mechanisms and ionization rate. The particle densities increase with increasing SEE coefficient from 0 to 0.3 as well as the sheath's electric field and electron source. Moreover, the SEE coefficient also influences the electron heating mechanism and electron power dissipation in the plasma and both of them increase with increasing SEE coefficient within the range from 0 to 0.3 as a result of increasing of electron density.

关键词: dual frequency, secondary electron emission, atmospheric pressure discharge

Abstract:

A one-dimensional (1D) fluid simulation of dual frequency discharge in helium gas at atmospheric pressure is carried out to investigate the role of the secondary electron emission on the surfaces of the electrodes. In the simulation, electrons, ions of He+ and He2+, metastable atoms of Heast and metastable molecules of He2* are included. It is found that the secondary electron emission coefficient significantly influences plasma density and electric field as well as electron heating mechanisms and ionization rate. The particle densities increase with increasing SEE coefficient from 0 to 0.3 as well as the sheath's electric field and electron source. Moreover, the SEE coefficient also influences the electron heating mechanism and electron power dissipation in the plasma and both of them increase with increasing SEE coefficient within the range from 0 to 0.3 as a result of increasing of electron density.

Key words: dual frequency, secondary electron emission, atmospheric pressure discharge

中图分类号:  (Plasma sources)

  • 52.50.Dg
52.50.Qt (Plasma heating by radio-frequency fields; ICR, ICP, helicons) 52.65.-y (Plasma simulation)