Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature

doi:10.1088/1674-1056/20/11/116103

中国物理B ›› 2011, Vol. 20 ›› Issue (11): 116103-116103.doi: 10.1088/1674-1056/20/11/116103

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇下一篇

Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature

白安琪, 郑军, 陶冶了, 左玉华, 薛春来, 成步文, 王启明

State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

收稿日期:2011-04-08 修回日期:2011-06-29 出版日期:2011-11-15 发布日期:2011-11-15
基金资助:
Project supported by the Major State Basic Research Programme of China (Grant No. 2007CB613404), the National Natural Science Foundation of China (Grant Nos. 60906035, 61036001, 61036003, and 51072194), and the Knowledge Innovation Program of the Chinese Academy of Sciences (Grant No. ISCAS2009T01).

Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature

Bai An-Qi(白安琪), Zheng Jun(郑军), Tao Ye-Liao(陶冶了), Zuo Yu-Hua(左玉华), Xue Chun-Lai(薛春来), Cheng Bu-Wen(成步文)^†, and Wang Qi-Ming(王启明)

State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received:2011-04-08 Revised:2011-06-29 Online:2011-11-15 Published:2011-11-15
Supported by:
Project supported by the Major State Basic Research Programme of China (Grant No. 2007CB613404), the National Natural Science Foundation of China (Grant Nos. 60906035, 61036001, 61036003, and 51072194), and the Knowledge Innovation Program of the Chinese Academy of Sciences (Grant No. ISCAS2009T01).

摘要/Abstract

摘要： Well-aligned and closely-packed silicon nanopillar (SNP) arrays are fabricated by using a simple method with magnetron sputtering of Si on a porous anodic alumina (PAA) template at room temperature. The SNPs are formed by selective growth on the top of the PAA pore walls. The growth mechanism analysis indicates that the structure of the SNPs can be modulated by the pore spacing of the PAA and the sputtering process and is independent of the wall width of the PAA. Moreover, nanocrystals are identified by using transmission electron microscopy in the as-deposited SNP samples, which are related to the heat isolation structure of the SNPs. The Raman focus depth profile reveals a high crystallization ratio on the surface.

Abstract: Well-aligned and closely-packed silicon nanopillar (SNP) arrays are fabricated by using a simple method with magnetron sputtering of Si on a porous anodic alumina (PAA) template at room temperature. The SNPs are formed by selective growth on the top of the PAA pore walls. The growth mechanism analysis indicates that the structure of the SNPs can be modulated by the pore spacing of the PAA and the sputtering process and is independent of the wall width of the PAA. Moreover, nanocrystals are identified by using transmission electron microscopy in the as-deposited SNP samples, which are related to the heat isolation structure of the SNPs. The Raman focus depth profile reveals a high crystallization ratio on the surface.

Key words: silicon nanopillar arrays, porous anodic alumina, nanocrystal, room temperature

中图分类号: (Structure of nanowires and nanorods (long, free or loosely attached, quantum wires and quantum rods, but not gate-isolated embedded quantum wires))

61.46.Km

78.67.Qa (Nanorods) 81.16.Dn (Self-assembly) 61.46.Hk (Nanocrystals)

白安琪, 郑军, 陶冶了, 左玉华, 薛春来, 成步文, 王启明. Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature[J]. 中国物理B, 2011, 20(11): 116103-116103.

Bai An-Qi(白安琪), Zheng Jun(郑军), Tao Ye-Liao(陶冶了), Zuo Yu-Hua(左玉华), Xue Chun-Lai(薛春来), Cheng Bu-Wen(成步文), and Wang Qi-Ming(王启明) . Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature[J]. Chin. Phys. B, 2011, 20(11): 116103-116103.

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Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature

Si nanopillar arrays with nanocrystals produced by template-induced growth at room temperature

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