Secondary electron emission yield from vertical graphene nanosheets by helicon plasma deposition

doi:10.1088/1674-1056/ac11dd

中国物理B ›› 2022, Vol. 31 ›› Issue (2): 27901-027901.doi: 10.1088/1674-1056/ac11dd

Secondary electron emission yield from vertical graphene nanosheets by helicon plasma deposition

Xue-Lian Jin(金雪莲)^1,2, Pei-Yu Ji(季佩宇)^1,2, Lan-Jian Zhuge(诸葛兰剑)^3,†, Xue-Mei Wu(吴雪梅)^1,2, and Cheng-Gang Jin(金成刚)^4,‡

1 School of Physical Science and Technology, Soochow University, Suzhou 215006, China;
2 Provincial Key Laboratory of Thin Films, Soochow University, Suzhou 215006, China;
3 Soochow University Analysis and Testing Center, Suzhou 215006, China;
4 Laboratory for Space Environment and Physical Sciences, Harbin Institute of Technology, Harbin 150001, China

收稿日期:2021-04-29 修回日期:2021-06-20 接受日期:2021-07-07 出版日期:2022-01-13 发布日期:2022-01-22
通讯作者: Lan-Jian Zhuge, Cheng-Gang Jin E-mail:ljzhuge@suda.edu.cn;cgjin@hit.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 11975163). The authors would like to thank Dr. Tan Haiyun for his suggestion for this work.

Secondary electron emission yield from vertical graphene nanosheets by helicon plasma deposition

Xue-Lian Jin(金雪莲)^1,2, Pei-Yu Ji(季佩宇)^1,2, Lan-Jian Zhuge(诸葛兰剑)^3,†, Xue-Mei Wu(吴雪梅)^1,2, and Cheng-Gang Jin(金成刚)^4,‡

1 School of Physical Science and Technology, Soochow University, Suzhou 215006, China;
2 Provincial Key Laboratory of Thin Films, Soochow University, Suzhou 215006, China;
3 Soochow University Analysis and Testing Center, Suzhou 215006, China;
4 Laboratory for Space Environment and Physical Sciences, Harbin Institute of Technology, Harbin 150001, China

Received:2021-04-29 Revised:2021-06-20 Accepted:2021-07-07 Online:2022-01-13 Published:2022-01-22
Contact: Lan-Jian Zhuge, Cheng-Gang Jin E-mail:ljzhuge@suda.edu.cn;cgjin@hit.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 11975163). The authors would like to thank Dr. Tan Haiyun for his suggestion for this work.

摘要/Abstract

摘要： The secondary electron emission yields of materials depend on the geometries of their surface structures. In this paper, a method of depositing vertical graphene nanosheet (VGN) on the surface of the material is proposed, and the secondary electron emission (SEE) characteristics for the VGN structure are studied. The COMSOL simulation and the scanning electron microscope (SEM) image analysis are carried out to study the secondary electron yield (SEY). The effect of aspect ratio and packing density of VGN on SEY under normal incident condition are studied. The results show that the VGN structure has a good effect on suppressing SEE.

关键词: secondary electron emission, secondary electron yield, vertical graphene nanosheets, scanning electron microscope

Abstract: The secondary electron emission yields of materials depend on the geometries of their surface structures. In this paper, a method of depositing vertical graphene nanosheet (VGN) on the surface of the material is proposed, and the secondary electron emission (SEE) characteristics for the VGN structure are studied. The COMSOL simulation and the scanning electron microscope (SEM) image analysis are carried out to study the secondary electron yield (SEY). The effect of aspect ratio and packing density of VGN on SEY under normal incident condition are studied. The results show that the VGN structure has a good effect on suppressing SEE.

Key words: secondary electron emission, secondary electron yield, vertical graphene nanosheets, scanning electron microscope

中图分类号: (Electron impact: secondary emission)

79.20.Hx

81.05.U- (Carbon/carbon-based materials) 78.20.Bh (Theory, models, and numerical simulation) 68.37.Hk (Scanning electron microscopy (SEM) (including EBIC))

Xue-Lian Jin(金雪莲), Pei-Yu Ji(季佩宇), Lan-Jian Zhuge(诸葛兰剑), Xue-Mei Wu(吴雪梅), and Cheng-Gang Jin(金成刚). Secondary electron emission yield from vertical graphene nanosheets by helicon plasma deposition[J]. 中国物理B, 2022, 31(2): 27901-027901.

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Secondary electron emission yield from vertical graphene nanosheets by helicon plasma deposition

Secondary electron emission yield from vertical graphene nanosheets by helicon plasma deposition

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