中国物理B ›› 2005, Vol. 14 ›› Issue (7): 1465-1470.doi: 10.1088/1009-1963/14/7/035

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Incident angle dependence of secondary electron emission from carbon induced by swift H2+

周筑颖1, 施立群1, 赵国庆1, 卢其亮2   

  1. (1)Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China; (2)National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093,China;Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China
  • 收稿日期:2004-07-12 修回日期:2005-03-04 出版日期:2005-06-20 发布日期:2005-06-20

Incident angle dependence of secondary electron emission from carbon induced by swift H2+

Lu Qi-Liang (卢其亮)ab, Zhou Zhu-Ying (周筑颖)b, Shi Li-Qun (施立群)b, Zhao Guo-Qing (赵国庆)b    

  1. a National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China; b Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China
  • Received:2004-07-12 Revised:2005-03-04 Online:2005-06-20 Published:2005-06-20

摘要: The incident angle dependence of secondary electron emission induced by a swift H$_{2}^{+}$ ion impinging on carbon is studied using the Monte Carlo method combined with the semiempirical theory. The relationships both between the electron emission yield and the project angle and between the statistics and the projectile angle are investigated. The results show that the backward electron emission yield deviates from the inverse cosine law, due to the effect of the valence electrons of H$_{2}^{+}$. The ratio of the forward electron emission yield to the backward electron emission yield at the inclining incidence is different from that at the normal incidence. The statistical distribution of electron emission is independent of the incident angle. The value of $b$, the deviation parameter from the Poisson distribution, increases with projectile energy.

关键词: secondary electron emission, incidence angle, Monte-Carlo simulation, valence electron, statistical distribution

Abstract: The incident angle dependence of secondary electron emission induced by a swift H$_{2}^{+}$ ion impinging on carbon is studied using the Monte Carlo method combined with the semiempirical theory. The relationships both between the electron emission yield and the project angle and between the statistics and the projectile angle are investigated. The results show that the backward electron emission yield deviates from the inverse cosine law, due to the effect of the valence electrons of H$_{2}^{+}$. The ratio of the forward electron emission yield to the backward electron emission yield at the inclining incidence is different from that at the normal incidence. The statistical distribution of electron emission is independent of the incident angle. The value of $b$, the deviation parameter from the Poisson distribution, increases with projectile energy.

Key words: secondary electron emission, incidence angle, Monte-Carlo simulation, valence electron, statistical distribution

中图分类号:  (Electron impact: secondary emission)

  • 79.20.Hx
02.70.Uu (Applications of Monte Carlo methods) 02.50.Ng (Distribution theory and Monte Carlo studies)