中国物理B ›› 2018, Vol. 27 ›› Issue (2): 25201-025201.doi: 10.1088/1674-1056/27/2/025201

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Numerical study on discharge characteristics influenced by secondary electron emission in capacitive RF argon glow discharges by fluid modeling

Lu-Lu Zhao(赵璐璐), Yue Liu(刘悦), Tagra Samir   

  1. 1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China;
    2. School of Information Science and Engineering, Dalian Polytechnic University, Dalian 116034, China
  • 收稿日期:2017-08-18 修回日期:2017-10-12 出版日期:2018-02-05 发布日期:2018-02-05
  • 通讯作者: Yue Liu E-mail:liuyue@dlut.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 51172101).

Numerical study on discharge characteristics influenced by secondary electron emission in capacitive RF argon glow discharges by fluid modeling

Lu-Lu Zhao(赵璐璐)1,2, Yue Liu(刘悦)1, Tagra Samir1   

  1. 1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China;
    2. School of Information Science and Engineering, Dalian Polytechnic University, Dalian 116034, China
  • Received:2017-08-18 Revised:2017-10-12 Online:2018-02-05 Published:2018-02-05
  • Contact: Yue Liu E-mail:liuyue@dlut.edu.cn
  • About author:52.20.-j; 52.25.-b; 5.25.Jm; 52.30.-q
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 51172101).

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摘要： A one-dimensional (1D) fluid model of capacitive RF argon glow discharges between two parallel-plate electrodes at low pressure is employed. The influence of the secondary electron emission on the plasma characteristics in the discharges is investigated numerically by the model. The results show that as the secondary electron emission coefficient increases, the cycle-averaged electric field has almost no change; the cycle-averaged electron temperature in the bulk plasma almost does not change, but it increases in the two sheath regions; the cycle-averaged ionization rate, electron density, electron current density, ion current density, and total current density all increase. Also, the cycle-averaged secondary electron fluxes on the surfaces of the electrodes increase as the secondary electron emission coefficient increases. The evolutions of the electron flux, the secondary electron flux and the ion flux on the powered electrode increase as the secondary electron emission coefficient increases. The cycle-averaged electron pressure heating, electron Ohmic heating, electron heating, and ion heating in the two sheath regions increase as the secondary electron emission coefficient increases. The cycle-averaged electron energy loss increases with increasing secondary electron emission coefficient.

关键词: RF glow discharge, secondary electron emission, fluid model

Abstract: A one-dimensional (1D) fluid model of capacitive RF argon glow discharges between two parallel-plate electrodes at low pressure is employed. The influence of the secondary electron emission on the plasma characteristics in the discharges is investigated numerically by the model. The results show that as the secondary electron emission coefficient increases, the cycle-averaged electric field has almost no change; the cycle-averaged electron temperature in the bulk plasma almost does not change, but it increases in the two sheath regions; the cycle-averaged ionization rate, electron density, electron current density, ion current density, and total current density all increase. Also, the cycle-averaged secondary electron fluxes on the surfaces of the electrodes increase as the secondary electron emission coefficient increases. The evolutions of the electron flux, the secondary electron flux and the ion flux on the powered electrode increase as the secondary electron emission coefficient increases. The cycle-averaged electron pressure heating, electron Ohmic heating, electron heating, and ion heating in the two sheath regions increase as the secondary electron emission coefficient increases. The cycle-averaged electron energy loss increases with increasing secondary electron emission coefficient.

Key words: RF glow discharge, secondary electron emission, fluid model

中图分类号:  (Elementary processes in plasmas)

  • 52.20.-j
52.25.-b (Plasma properties) 52.30.-q (Plasma dynamics and flow)