Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

doi:10.1088/1674-1056/26/3/035201

Abstract The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature (T_g) in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that T_g decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the T_g, were studied. It was found that T_g decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the T_g can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from α to γ mode in the pulse-modulated rf discharge was investigated, the spatial distributions of T_g in the two modes show different features and the ion Joule heating is more important during the mode transition.

Keywords: gas heating pulse-modulated rf discharge atmospheric pressure glow discharge

Received: 24 October 2016
Revised: 08 December 2016
Accepted manuscript online:

PACS:	52.20.-j	(Elementary processes in plasmas)
	52.25.-b	(Plasma properties)
	52.40.Kh	(Plasma sheaths)

Fund: Project supported by the National Natural Science Foundation of China (Granted Nos. 11405022 and 11475040) and Dalian High Level Talent Innovation Support Plan, China (Grant No. 2015R050).

Corresponding Authors: De-Zhen Wang
E-mail: wangdez@dlut.edu.cn

Cite this article:

Qi Wang(王奇), Xiao-Li Yu(于晓丽), De-Zhen Wang(王德真) Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge 2017 Chin. Phys. B 26 035201

[1]	Liu F C, He Y F and Wang X F 2014 Chin. Phys. B 23 075209
[2]	Sun J Z, Wang Q, Wang Y H, Zhang J H and Wang D Z 2008 Chin. Phys. Lett. 25 4054
[3]	He X, Dang W H and Jia H H 2014 Chin. Phys. Lett. 31 95204
[4]	Xu S J, Yao J and Bai M D 2012 Acta Phys. Sin. 61 195202 (in Chinese)
[5]	Yu Q, Deng Y F, Liu Y and Han X W 2008 Chin. Phys. Lett. 25 2569
[6]	Liu X M, Song Y H and Wang Y N 2011 Chin. Phys. B 20 065205
[7]	Kim D B, Jung H, Gweon B, Moon S Y, Rhee J K and Choe W 2011 Phys. Plasmas 18 043503
[8]	Shi J J, Zhang J, Qiu G, Walsh J L and Kong M G 2008 Appl. Phys. Lett. 93 041502
[9]	Sun J Z, Wang Q, Ding Z F, Li X C and Wang D Z 2011 Phys. Plasmas 18 123502
[10]	Wang Q, Sun J Z and Wang D Z 2012 IEEE Trans. Plasma Sci. Tech. 40 35
[11]	Wang Q, Sun J Z, Nozaki T, Ding Z F, Ding H B, Wang Z H and Wang D Z 2014 Phys. Plasmas 21 083503
[12]	Hu J T, Liu X Y, Liu J H and Xiong Z L 2012 Phys. Plasmas 19 063505
[13]	Ring Z, Mantei T D and Jackson H E 1995 Appl. Phys. Lett. 66 3380
[14]	Ishigaki T, Fan X and Sakuta T 1997 Appl. Phys. Lett. 71 3787
[15]	Pytte A and Winsor N K 1966 Proc of 7th Int. Conf. Phenomena in Ionized Gases 1 709
[16]	Beulens J J, Milojevic D and Schram D C 1991 Physics of Fluids B: Plasma Physics 3 2548
[17]	Sakiyama Y and Graves D B 2007 J. Appl. Phys. 7 101
[18]	Staack D, Farouk B, Gutsol A and Fridman A 2008 Plasma Sources Sci. Technol. 17 025013
[19]	Baeva M, Kozakov R and Gorchakov S 2012 Plasma Sources Sci. Technol. 13 21
[20]	Farouk T, Farouk B, Staack D, Gutsol A and Fridman A 2008 Plasma Sources Sci. Technol. 17 035015
[21]	Fridman A and Kennedy L A 2004 Plasma Phys. Eng. 22 2011
[22]	Ward A L 1962 J. Appl. Phys. 33 2789
[23]	Shon J W and Kushner M J 1994 J. Appl. Phys. 75 1883
[24]	Pouvesle J M, Bouchoule A and Stevefelt J J 1982 Chem. Phys. 77 817
[25]	Deloche R, Monchicourt P and Cheret M 1976 Phys. Rev. A 13 1140
[26]	Emmert F, Angermann H H, Dux R and Langhoff H 1988 J. Phys. D: Appl. Phys. 21 667
[27]	Stevefelt J, Pouvesle J M and Bouchoule A J 1982 Chem. Phys. 76 4006
[28]	Wang Q, Economou D J and Donnelly V M 2006 J. Appl. Phys. 100 023301
[29]	Shang W L, Wang D Z and Kong M G 2007 Chin. Phys. 16 0485
[30]	Chen D M and Pfender E 1981 IEEE Trans. Plasma Sci. 4 0265
[31]	Deconinck T and Raja L L 2009 Plasma Process. Polym. 6 335
[32]	Scharfetter D L and Gummel H K 1969 IEEE Trans. Electron Devices 16 64

[1]	Surface modification of polytetrafluoroethylene film using single liquid electrode atmospheric- pressure glow discharge Zhou Lan(周澜), Lü Guo-Hua(吕国华), Chen Wei(陈维), Pang Hua(庞华), Zhang Gu-Ling(张谷令), and Yang Si-Ze(杨思泽) . Chin. Phys. B, 2011, 20(6): 065206.
[2]	Characterizing uniform discharge in atmospheric helium by numerical modelling Lü Bo(吕博), Wang Xin-Xin(王新新), Luo Hai-Yun(罗海云), and Liang Zhuo(梁卓). Chin. Phys. B, 2009, 18(2): 646-651.
[3]	Simulation of radio-frequency atmospheric pressure glow discharge in $\gamma$ mode Shang Wan-Li(尚万里), Wang De-Zhen(王德真), and Michael G. Kong. Chin. Phys. B, 2007, 16(2): 485-492.
[4]	Glow and pseudo-glow discharges in a surface discharge generator Li Xue-Chen (李雪辰), Dong Li-Fang (董丽芳), Wang Long (王龙). Chin. Phys. B, 2005, 14(7): 1418-1422.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

Cite this article:

Online attention