Chin. Phys. B
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Chin. Phys.  2005, Vol. 14 Issue (1): 163-168    DOI: 10.1088/1009-1963/14/1/030
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search |
Two-dimensional temperature distribution inside a hemispherical bowl-shaped target for plasma source ion implantation
Wang Yan-Huia, Wang De-Zhena, Liu Cheng-Senb
a State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Department of Physics, Dalian University of Technology, Dalian,116023, China; b State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Department of Physics, Dalian University of Technology, Dalian,116023, China;Department of Physics, Liaoning Normal University, Dalian,116029, China

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