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Chin. Phys. B, 2020, Vol. 29(2): 020702    DOI: 10.1088/1674-1056/ab671c
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A method for calibrating the confocal volume of a confocal three-dimensional micro-x-ray fluorescence setup

Peng Zhou(周鹏)1,2,3, Xin-Ran Ma(马欣然)4, Shuang Zhang(张爽)1,2,3, Tian-Xi Sun(孙天希)1,2,3, Zhi-Guo Liu(刘志国)1,2,3
1 College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China;
2 Applied Optics Beijing Key Laboratory, Department of Physics, Beijing Normal University, Beijing 100875, China;
3 Beijing Radiation Center, Beijing 100875, China;
4 Department of Physics, Beijing Normal University, Beijing 100875, China
Abstract  The measurement of the confocal volume of a confocal three-dimensional micro-x-ray fluorescence (3D-XRF) setup is a key step in the field of confocal 3D-XRF analysis. With the development of x-ray facilities and optical devices, 3D-XRF analysis with a micro confocal volume will create a great potential for 2D and 3D microstructural analysis and accurate quantitative analysis. However, the classic measurement method of scanning metal foils of a certain thickness leads to inaccuracy. A method for calibrating the confocal volume is proposed in this paper. The new method is based on the basic content of the textbook, and the theoretical results and the feasibility are given in detail for the 3D-XRF mono-chromatic x-ray condition and the poly-chromatic x-ray condition. We obtain a set of experimental confirmation using the poly-chromatic x-ray tube in the laboratory. It is proved that the sensitivity factor of the 3D-XRF can be directly and accurately obtained in a real calibration process.
Keywords:  three-dimensional micro-x-ray fluorescence (3D-XRF)      depth analysis      confocal volume      probe calibrating  
Received:  28 October 2019      Revised:  04 December 2019      Published:  05 February 2020
PACS:  07.85.Tt (X-ray microscopes)  
  07.85.Qe (Synchrotron radiation instrumentation)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 11675019 and 11875087).
Corresponding Authors:  Zhi-Guo Liu     E-mail:  liuzhiguo512@126.com

Cite this article: 

Peng Zhou(周鹏), Xin-Ran Ma(马欣然), Shuang Zhang(张爽), Tian-Xi Sun(孙天希), Zhi-Guo Liu(刘志国) A method for calibrating the confocal volume of a confocal three-dimensional micro-x-ray fluorescence setup 2020 Chin. Phys. B 29 020702

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