Fabrication of microresonators by using photoresist developer as etchant
Shu-Qing Song(宋树清), Jian-Wen Xu(徐建文), Zhi-Kun Han(韩志坤), Xiao-Pei Yang(杨晓沛), Yu-Ting Sun(孙宇霆), Xiao-Han Wang(王晓晗), Shao-Xiong Li(李邵雄), Dong Lan(兰栋), Jie Zhao(赵杰), Xin-Sheng Tan(谭新生), and Yang Yu(于扬)
Chin. Phys. B
.
2021, (6): 60313
-060313
.
DOI: 10.1088/1674-1056/abf112
