Etching-assisted femtosecond laser microfabrication
Monan Liu(刘墨南), Mu-Tian Li(李木天), Han Yang(杨罕), Hong-Bo Sun(孙洪波)
Chin. Phys. B . 2018, (9): 94212 -094212 .  DOI: 10.1088/1674-1056/27/9/094212