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Other articles related with "ion energy distributions":
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115202 |
Shuai Wang(王帅), Hai-Feng Long(龙海凤), Zhen-Hua Bi(毕振华), Wei Jiang(姜巍), Xiang Xu(徐翔), You-Nian Wang(王友年) |
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One-dimensional hybrid simulation of the electrical asymmetry effectcaused by the fourth-order harmonic in dual-frequencycapacitively coupled plasma |
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Chin. Phys. B
2016 Vol.25 (11): 115202-115202
[Abstract]
(599)
[HTML 1 KB]
[PDF 487 KB]
(267)
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