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Other articles related with "excimer laser annealing"：
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98503 |
Chen Wang(王尘), Wei-Hang Fan(范伟航), Yi-Hong Xu(许怡红), Yu-Chao Zhang(张宇超), Hui-Chen Fan(范慧晨), Cheng Li(李成), and Song-Yan Cheng(陈松岩) |
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Phosphorus diffusion and activation in fluorine co-implanted germanium after excimer laser annealing |
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Chin. Phys. B
2022 Vol.31 (9): 98503-098503
[Abstract]
(382)
[HTML 1 KB]
[PDF 1120 KB]
(227)
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18502 |
Chen Wang(王尘), Yihong Xu(许怡红), Cheng Li(李成), Haijun Lin(林海军) |
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Improved performance of Ge n+/p diode by combining laser annealing and epitaxial Si passivation |
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Chin. Phys. B
2018 Vol.27 (1): 18502-018502
[Abstract]
(680)
[HTML 1 KB]
[PDF 552 KB]
(197)
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