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Other articles related with "deposition thickness profile"：
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74702 |
Xiaoyong Lu(卢肖勇), Junjie Chai(柴俊杰) |
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Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition |
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Chin. Phys. B
2019 Vol.28 (7): 74702-074702
[Abstract]
(608)
[HTML 1 KB]
[PDF 543 KB]
(187)
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