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Other articles related with "capacitively coupled plasmas"：
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65202 |
Dao-Man Han(韩道满), Yong-Xin Liu(刘永新), Fei Gao(高飞), Wen-Yao Liu(刘文耀), Jun Xu(徐军), You-Nian Wang(王友年) |
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Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O2 |
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Chin. Phys. B
2018 Vol.27 (6): 65202-065202
[Abstract]
(691)
[HTML 1 KB]
[PDF 677 KB]
(237)
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115201 |
Tagra Samir, Yue Liu(刘悦), Lu-Lu Zhao(赵璐璐), Yan-Wen Zhou(周艳文) |
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Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure |
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Chin. Phys. B
2017 Vol.26 (11): 115201-115201
[Abstract]
(844)
[HTML 0 KB]
[PDF 368 KB]
(226)
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115202 |
Shuai Wang(王帅), Hai-Feng Long(龙海凤), Zhen-Hua Bi(毕振华), Wei Jiang(姜巍), Xiang Xu(徐翔), You-Nian Wang(王友年) |
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One-dimensional hybrid simulation of the electrical asymmetry effectcaused by the fourth-order harmonic in dual-frequencycapacitively coupled plasma |
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Chin. Phys. B
2016 Vol.25 (11): 115202-115202
[Abstract]
(564)
[HTML 1 KB]
[PDF 487 KB]
(264)
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