1 Laboratory of Information Functional Materials and Devices, School of Science & State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China; 2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China; 3 The Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; 4 China Aerospace System Simulation Technology Co., Ltd. (Beijing), Beijing 100195, China; 5 Division of Interdisciplinary and Comprehensive Research & Platform for Characterization and Test, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China; 6 Center for Optoelectronics Materials and Devices & Key Laboratory of Optical Field Manipulation of Zhejiang Province, Department of Physics, Zhejiang Sci-Tech University, Hangzhou 310018, China; 7 School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China; 8 College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210046, China; 9 National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing 210046, China
Abstract We report the edge-defined-film-fed (EFG)-grown β-Ga2O3-based Schottky photodiodes. The device has a reverse leakage current of ∼nA and a rectified ratio of ∼104 at V. In addition, the photodiode detector shows a dark current of 0.3 pA, a photo-responsivity (R) of 2.875 mA/W, a special detectivity (D*) of 1010 Jones, and an external quantum efficiency (EQE) of 1.4% at zero bias, illustrating a self-powered operation. This work may advance the development of the Ga2O3-based Schottky diode solar-blind photodetectors.
Fund: Project supported by BUPT Excellent Ph.D. Students Foundation (Grant No. CX2020314), the National Natural Science Foundation of China (Grant Nos. 61774019, 51572033, and 51572241), the Fund of State Key Laboratory of Information Photonics and Optical Communications (BUPT), and the Fundamental Research Funds for the Central Universities, China.
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