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Synthesis and room temperature NO2 gas sensing properties of WO3 nanowires/porous silicon hybrid structure |
1. Tianjin University
2.
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Abstract In the present work, we report on the fabrication and performance of a room temperature NO2 gas sensor based on a WO3 nanowires/Porous silicon hybrid structure. W18O49 nanowires were synthesized directly from a sputtered tungsten film on PS layer by heating in an argon atmosphere. After a carefully controlled annealing treatment, WO3 nanowires obtained on PS layer without losing the morphology. The morphology, phase structure, and crystallinity of the nanowires were investigated by using field emission scanning electron microscopy (FESEM), X-ray diffractometer (XRD), and high resolution transmission electron microscopy (HRTEM). Comparative gas sensing results indicated that the sensor that was based on the WO3 nanowires exhibited a much higher sensitivity than that based on the PS and pure WO3 nanowires in detecting NO2 gas at room temperature. The mechanism of WO3 nanowires/PS hybrid structure on the NO2 sensing was explained in detail.
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Received: 02 September 2013
Revised: 30 September 2013
Published: 31 October 2013
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| Fund: ;the Knowledge Innovation Program of the ChineseAcademy of Sciences |
Cite this article:
Synthesis and room temperature NO2 gas sensing properties of WO3 nanowires/porous silicon hybrid structure Chin. Phys. B 0
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