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Deposition of Hexagonal Boron Nitride Thin Films on Silver Nanoparticles Substrate |
1. Beijing University of Technology
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Abstract Silver nanoparticle thin films with different average particle diameter were grown on silicon substrate. Then boron nitride thin films were deposited upon the silver nanoparticles interlayers by radio frequency magnetron sputtering. The boron nitride thin films were characterized by Fourier transform infrared spectrum. The average particle diameters of silver nanoparticle thin films were 121.6, 79.4 and 179.2 nm respectively. The results show that the size of the silver nanoparticles has an effect on the intensity of infrared spectra of boron nitride thin films. An enhanced infrared absorption was detected for boron nitride thin film to grow on silver nanoparticle thin films. This result is helpful to study growth mechanism of boron nitride thin films.
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Received: 09 July 2013
Revised: 17 September 2013
Published: 31 October 2013
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| Fund: the Natural Science Foundation of Heilongjiang Province;the Fundamental Research Funds for the Central Universities of Ministry of Education of China |
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Corresponding Authors:
Jinxiang Deng
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Cite this article:
Deposition of Hexagonal Boron Nitride Thin Films on Silver Nanoparticles Substrate Chin. Phys. B 0
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