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Hybrid Device for Acoustic Noise Reduction and Energy Harvesting Based on Silicon Micro Perforated Panel Structure |
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Abstract A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro perforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon MEMS technology. The silicon MPP has dense and accurate micro holes. This noise reduction structure has the advantages of wide band and higher absorption coefficient. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as its good compatibility with the fabrication process. The MPP, piezoelectric membranes and metal bracket are assembled to a hybrid device with multifunction. The device exhibits good performance of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41mV.
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Received: 20 June 2013
Revised: 04 September 2013
Published: 31 October 2013
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Corresponding Authors:
Zhan Zhao
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Cite this article:
Hybrid Device for Acoustic Noise Reduction and Energy Harvesting Based on Silicon Micro Perforated Panel Structure Chin. Phys. B 0
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