Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon

doi:10.1088/1674-1056/22/10/106101

Abstract We describe the fabrication of silicon micro-hemispheres by adopting the conventional laser ablation of single crystalline silicon in the vacuum condition without using any catalysts or additives. The highly oriented structures of silicon micro-hemispheres exhibit many periodic nanoscale rings along their outer surfaces. We consider that the self-organized growth of silicon micro-structures is highly dependent on the laser intensity and background air medium. The difference between these surface modifications is attributed to the amount of laser energy deposited in the silicon material and the consequent cooling velocity.

Keywords: silicon micro-hemispheres pulsed laser ablation

Received: 04 March 2013
Revised: 19 June 2013
Accepted manuscript online:

PACS:	61.46.Bc	(Structure of clusters (e.g., metcars; not fragments of crystals; free or loosely aggregated or loosely attached to a substrate))
	52.38.Mf	(Laser ablation)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 11105085 and 11075097), the Excellent Youth and Middle Age Scientists Fund of Shandong Province, China (Grant No. BS2012CL024), and the Project of Higher Educational Science and Technology Program of Shandong Province, China (Grant No. J12LA51).

Corresponding Authors: Chen Ming, Liu Xiang-Dong
E-mail: chenming@sdu.edu.cn;xdliu@sdu.edu.cn

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Chen Ming (陈明), Li Shuang (李爽), Cui Qing-Qiang (崔清强), Liu Xiang-Dong (刘向东) Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon 2013 Chin. Phys. B 22 106101

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Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon

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