Abstract The controllable periodic M-shape gratings are fabricated on the surface of silica glass by three coplanar interfering beams from a single femtosecond pulse. The configuration of the M-shape periodic structure is characterized by optical microscopy and atomic force microscopy. The experimental results and the theoretical simulation show that the period and the modulation depth ratio between the neighboring grooves of the fabricated gratings can be controlled by adjusting the collision angles and pulse energy of the three beams, respectively.
Received: 18 March 2009
Revised: 18 April 2009
Accepted manuscript online:
Fund: Project supported by the Science
and Technology Key Program of Shandong Province, China (Grant No
2008GG10004020), and the Program of Excellent Team in the Harbin
Institute of Technology, China.
Cite this article:
Han Yan-Hua(韩艳华), Qu Shi-Liang(曲士良), Wang Qiang(王强), Guo Zhong-Yi(郭忠义), and Chen Xiang-Jun(陈相君) Controllable grating fabrication by three interfering replicas of single femtosecond laser pulse 2009 Chin. Phys. B 18 5331
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