中国物理B ›› 2023, Vol. 32 ›› Issue (8): 80702-080702.doi: 10.1088/1674-1056/ac9b38
Shangkun Shao(邵尚坤)1,2, Huiquan Li(李惠泉)1,2, Tianyu Yuan(袁天语)1,2, Xuepeng Sun(孙学鹏)1,2, Lu Hua(华路)1,2, Zhiguo Liu(刘志国)1,2, and Tianxi Sun(孙天希)1,2,†
Shangkun Shao(邵尚坤)1,2, Huiquan Li(李惠泉)1,2, Tianyu Yuan(袁天语)1,2, Xuepeng Sun(孙学鹏)1,2, Lu Hua(华路)1,2, Zhiguo Liu(刘志国)1,2, and Tianxi Sun(孙天希)1,2,†
摘要: Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples. The divergence of the x-ray beam was 0.33 mrad. In this paper, we used this instrumental setup to analyze a Si single crystal and a 50 nm HfO2 single-layer film deposited on a Si substrate.
中图分类号: (X-ray microscopes)