中国物理B ›› 2023, Vol. 32 ›› Issue (8): 80702-080702.doi: 10.1088/1674-1056/ac9b38

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Glancing incidence x-ray fluorescence spectrometry based on a single-bounce parabolic capillary

Shangkun Shao(邵尚坤)1,2, Huiquan Li(李惠泉)1,2, Tianyu Yuan(袁天语)1,2, Xuepeng Sun(孙学鹏)1,2, Lu Hua(华路)1,2, Zhiguo Liu(刘志国)1,2, and Tianxi Sun(孙天希)1,2,†   

  1. 1. Key Laboratory of Beam Technology of the Ministry of Education, College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China;
    2. Institute of Radiation Technology, Beijing Academy of Science and Technology, Beijing 100875, China
  • 收稿日期:2022-08-27 修回日期:2022-10-10 接受日期:2022-10-19 发布日期:2023-07-27
  • 通讯作者: Tianxi Sun E-mail:stx@bnu.edu.cn
  • 基金资助:
    Project supported by the National Key Research and Development Program of China (Grant No.2021YFF0701202), and the National Natural Science Foundation of China(Grant No.11875087).

Glancing incidence x-ray fluorescence spectrometry based on a single-bounce parabolic capillary

Shangkun Shao(邵尚坤)1,2, Huiquan Li(李惠泉)1,2, Tianyu Yuan(袁天语)1,2, Xuepeng Sun(孙学鹏)1,2, Lu Hua(华路)1,2, Zhiguo Liu(刘志国)1,2, and Tianxi Sun(孙天希)1,2,†   

  1. 1. Key Laboratory of Beam Technology of the Ministry of Education, College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China;
    2. Institute of Radiation Technology, Beijing Academy of Science and Technology, Beijing 100875, China
  • Received:2022-08-27 Revised:2022-10-10 Accepted:2022-10-19 Published:2023-07-27
  • Contact: Tianxi Sun E-mail:stx@bnu.edu.cn
  • Supported by:
    Project supported by the National Key Research and Development Program of China (Grant No.2021YFF0701202), and the National Natural Science Foundation of China(Grant No.11875087).

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摘要： Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples. The divergence of the x-ray beam was 0.33 mrad. In this paper, we used this instrumental setup to analyze a Si single crystal and a 50 nm HfO2 single-layer film deposited on a Si substrate.

关键词: single-bounce parabolic capillary, glancing incident x-ray fluorescence (GIXRF), atomic layer deposition, film analysis

Abstract: Glancing incidence x-ray fluorescence spectrometry using a single-bounce parabolic capillary is proposed for the analysis of layered samples. The divergence of the x-ray beam was 0.33 mrad. In this paper, we used this instrumental setup to analyze a Si single crystal and a 50 nm HfO2 single-layer film deposited on a Si substrate.

Key words: single-bounce parabolic capillary, glancing incident x-ray fluorescence (GIXRF), atomic layer deposition, film analysis

中图分类号:  (X-ray microscopes)

  • 07.85.Tt
07.85.Qe (Synchrotron radiation instrumentation)