中国物理B ›› 2007, Vol. 16 ›› Issue (7): 2116-2119.doi: 10.1088/1009-1963/16/7/053

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A novel implantable multichannel silicon-based microelectrode

隋晓红, 张若昕, 裴为华, 陈弘达   

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083, China
  • 收稿日期:2006-06-12 修回日期:2006-11-13 出版日期:2007-07-20 发布日期:2007-07-04
  • 基金资助:
    Project supported by the National High Technology Research and Development Program of China (Grant No 2005AA311030) and the National Natural Science Foundation of China (Grant No 60536030).

A novel implantable multichannel silicon-based microelectrode

Sui Xiao-Hong(隋晓红)†, Zhang Ruo-Xin(张若昕), Pei Wei-Hua(裴为华), and Chen Hong-Da(陈弘达)   

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083, China
  • Received:2006-06-12 Revised:2006-11-13 Online:2007-07-20 Published:2007-07-04
  • Supported by:
    Project supported by the National High Technology Research and Development Program of China (Grant No 2005AA311030) and the National Natural Science Foundation of China (Grant No 60536030).

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摘要： Silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. The fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. The manufacturing process by micro-electromechanical system (MEMS) technology was detailed with four photolithographic masks. The microscopic photographs and SEM images indicated that the probe shank was 3mm long, 100\mum wide and 20\mu m thick with the recording sites spaced 120\mu m apart for good signal isolation. To facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. Curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5k\Omega to 6.0k\Omega with frequency changing from 10\,k to 10MHz.

关键词: MEMS, extracellular recording, microelectrode

Abstract: Silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. The fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. The manufacturing process by micro-electromechanical system (MEMS) technology was detailed with four photolithographic masks. The microscopic photographs and SEM images indicated that the probe shank was 3mm long, 100$\mu$m wide and 20$\mu$ m thick with the recording sites spaced 120$\mu$ m apart for good signal isolation. To facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. Curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5k$\Omega$  to 6.0k$\Omega$  with frequency changing from 10 k to 10MHz.

Key words: MEMS, extracellular recording, microelectrode

中图分类号:  (Micromanipulation of biological structures)

  • 87.80.Fe
85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices) 87.19.L- (Neuroscience) 87.19.R- (Mechanical and electrical properties of tissues and organs) 87.85.Va (Micromachining)