中国物理B ›› 2008, Vol. 17 ›› Issue (5): 1709-1715.doi: 10.1088/1674-1056/17/5/029

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A dynamic macromodel for distributed parameter magnetic microactuators

黄庆安1, 李伟华1, 方玉明2   

  1. (1)Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China; (2)Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China;Department of Optoelectrical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
  • 收稿日期:2007-06-17 修回日期:2007-09-25 出版日期:2008-05-20 发布日期:2008-05-20
  • 基金资助:
    Project supported in part by the National High Technology Research and Development Program of China (Grant No 2006AA04z302).

A dynamic macromodel for distributed parameter magnetic microactuators

Fang Yu-Ming(方玉明)a)b)†, Huang Qing-An(黄庆安)a), and Li Wei-Hua(李伟华)a)   

  1. a Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China; b Department of Optoelectrical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
  • Received:2007-06-17 Revised:2007-09-25 Online:2008-05-20 Published:2008-05-20
  • Supported by:
    Project supported in part by the National High Technology Research and Development Program of China (Grant No 2006AA04z302).

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摘要： This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions.

关键词: magnetic microactuator, macromodel, microelectromechanical systems (MEMS)

Abstract: This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions.

Key words: magnetic microactuator, macromodel, microelectromechanical systems (MEMS)

中图分类号:  (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

  • 85.85.+j
07.10.Cm (Micromechanical devices and systems) 85.70.-w (Magnetic devices)