A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches

doi:10.1088/1674-1056/abf12b

中国物理B ›› 2021, Vol. 30 ›› Issue (11): 118501-118501.doi: 10.1088/1674-1056/abf12b

A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches

Shan-Shan Wang(王姗姗)^1,2,3,4, Qian-Nan Wu(吴倩楠)^2,3,4,5,†, Yue-Sheng Gao(高跃升)^1,2,3,4, Jian-Gang Yu(余建刚)^1,2,3,4, Qian-Long Cao(曹钎龙)^1,2,3,4, Lu-Lu Han(韩路路)^1,2,3,4, and Meng-Wei Li(李孟委)^1,2,3,4,‡

1 School of Instrument and Electronics, North University of China, Taiyuan 030051, China;
2 Nantong Institute of Intelligent Opto-Mechatronics, North University of China, Nantong 226000, China;
3 Center for Microsystem Intergration, North University of China, Taiyuan 030051, China;
4 Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China;
5 School of Science, North University of China, Taiyuan 030051, China

收稿日期:2021-02-20 修回日期:2021-03-15 接受日期:2021-03-24 出版日期:2021-10-13 发布日期:2021-10-27
通讯作者: Qian-Nan Wu, Meng-Wei Li E-mail:qiannanwoo@nuc.edu.cn;lmwnuc@163.com
基金资助:
Project supported by the National Defense Technology Industry Strong Foundation Project, China (Grant No. JCKY2018408B006), the Information System New Items Project, China (Grant Nos. 2018XW0026 and 2019XW0010), and the Information System Pre-research Project, China (Grant No. 31513060101).

A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches

1 School of Instrument and Electronics, North University of China, Taiyuan 030051, China;
2 Nantong Institute of Intelligent Opto-Mechatronics, North University of China, Nantong 226000, China;
3 Center for Microsystem Intergration, North University of China, Taiyuan 030051, China;
4 Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China;
5 School of Science, North University of China, Taiyuan 030051, China

Received:2021-02-20 Revised:2021-03-15 Accepted:2021-03-24 Online:2021-10-13 Published:2021-10-27
Contact: Qian-Nan Wu, Meng-Wei Li E-mail:qiannanwoo@nuc.edu.cn;lmwnuc@163.com
Supported by:
Project supported by the National Defense Technology Industry Strong Foundation Project, China (Grant No. JCKY2018408B006), the Information System New Items Project, China (Grant Nos. 2018XW0026 and 2019XW0010), and the Information System Pre-research Project, China (Grant No. 31513060101).

摘要/Abstract

摘要： Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system (MEMS) single-pole double-throw (SPDT) switches are presented in this paper. The short-open-load-through (SOLT) calibration states can be completed simultaneously by using the MEMS electronic calibration, and the electronic calibrator can be reused 10⁶ times. The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz-20 GHz, the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states, respectively, and the insertion loss in through (thru) state is less than 0.27 dB. On the other hand, the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm. Our results demonstrate that the calibrator with integrated radio-frequency microelectromechanical system (RF MEMS) switches can not only provide reduced size, loss, and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency. It has great potential applications in millimeter-wave measurement and testing technologies, such as device testing, vector network analyzers, and RF probe stations.

关键词: microelectromechanical system (MEMS), electronic calibration kit, single-pole double-throw (SPDT) switch, short-open-load-through (SOLT) calibration

Abstract: Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechanical system (MEMS) single-pole double-throw (SPDT) switches are presented in this paper. The short-open-load-through (SOLT) calibration states can be completed simultaneously by using the MEMS electronic calibration, and the electronic calibrator can be reused 10⁶ times. The simulation results show that this novel electronic calibration can be used in a frequency range of 0.1 GHz-20 GHz, the return loss is less than 0.18 dB and 0.035 dB in short-circuit and open-circuit states, respectively, and the insertion loss in through (thru) state is less than 0.27 dB. On the other hand, the size of this novel calibration kit is only 6 mm×2.8 mm×0.8 mm. Our results demonstrate that the calibrator with integrated radio-frequency microelectromechanical system (RF MEMS) switches can not only provide reduced size, loss, and calibration cost compared with traditional calibration kit but also improves the calibration accuracy and efficiency. It has great potential applications in millimeter-wave measurement and testing technologies, such as device testing, vector network analyzers, and RF probe stations.

Key words: microelectromechanical system (MEMS), electronic calibration kit, single-pole double-throw (SPDT) switch, short-open-load-through (SOLT) calibration

中图分类号: (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

85.85.+j

87.80.Ek (Mechanical and micromechanical techniques)

Shan-Shan Wang(王姗姗), Qian-Nan Wu(吴倩楠), Yue-Sheng Gao(高跃升), Jian-Gang Yu(余建刚), Qian-Long Cao(曹钎龙), Lu-Lu Han(韩路路), and Meng-Wei Li(李孟委). A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches[J]. 中国物理B, 2021, 30(11): 118501-118501.

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A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches

A novel multifunctional electronic calibration kit integrated by MEMS SPDT switches

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