Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming

doi:10.1088/1674-1056/22/11/117901

中国物理B ›› 2013, Vol. 22 ›› Issue (11): 117901-117901.doi: 10.1088/1674-1056/22/11/117901

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming

赵克, 冯立辉, 王茜蒨, 刘明智, 王本国, 崔芳, 孙雨南

School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China

收稿日期:2013-06-03 修回日期:2013-07-02 出版日期:2013-09-28 发布日期:2013-09-28
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 61027007).

Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming

Zhao Ke (赵克), Feng Li-Hui (冯立辉), Wang Qian-Qian (王茜蒨), Liu Ming-Zhi (刘明智), Wang Ben-Guo (王本国), Cui Fang (崔芳), Sun Yu-Nan (孙雨南)

School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China

Received:2013-06-03 Revised:2013-07-02 Online:2013-09-28 Published:2013-09-28
Contact: Feng Li-Hui E-mail:lihui.feng@bit.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 61027007).

摘要/Abstract

摘要： In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method (FEM). A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s^-1 to 1.1° s^-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk (ARW) is reduced from 2.19° h^-1/2 to 1.42° h^-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h^-1 to 25.4° h^-1.

关键词: femtosecond laser trimming, micro-electro-mechanical system (MEMS) gyroscope, finite element method (FEM) simulation

Abstract: In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method (FEM). A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s^-1 to 1.1° s^-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk (ARW) is reduced from 2.19° h^-1/2 to 1.42° h^-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h^-1 to 25.4° h^-1.

Key words: femtosecond laser trimming, micro-electro-mechanical system (MEMS) gyroscope, finite element method (FEM) simulation

中图分类号: (Laser ablation)

79.20.Eb

06.30.Gv (Velocity, acceleration, and rotation) 02.70.Dh (Finite-element and Galerkin methods)

赵克, 冯立辉, 王茜蒨, 刘明智, 王本国, 崔芳, 孙雨南. Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming[J]. 中国物理B, 2013, 22(11): 117901-117901.

Zhao Ke (赵克), Feng Li-Hui (冯立辉), Wang Qian-Qian (王茜蒨), Liu Ming-Zhi (刘明智), Wang Ben-Guo (王本国), Cui Fang (崔芳), Sun Yu-Nan (孙雨南). Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming[J]. Chin. Phys. B, 2013, 22(11): 117901-117901.

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Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming

Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming

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