中国物理B ›› 2019, Vol. 28 ›› Issue (9): 98501-098501.doi: 10.1088/1674-1056/ab3443

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Efficient molecular model for squeeze-film damping in rarefied air

Cun-Hao Lu(陆存豪), Pu Li(李普), Yu-Ming Fang(方玉明)   

  1. 1 School of Mechanical Engineering, Southeast University, Nanjing 211100, China;
    2 College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 211100, China
  • 收稿日期:2019-02-27 修回日期:2019-06-27 出版日期:2019-09-05 发布日期:2019-09-05
  • 通讯作者: Pu Li E-mail:seulp@263.net
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant No. 51375091).

Efficient molecular model for squeeze-film damping in rarefied air

Cun-Hao Lu(陆存豪)1, Pu Li(李普)1, Yu-Ming Fang(方玉明)2   

  1. 1 School of Mechanical Engineering, Southeast University, Nanjing 211100, China;
    2 College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 211100, China
  • Received:2019-02-27 Revised:2019-06-27 Online:2019-09-05 Published:2019-09-05
  • Contact: Pu Li E-mail:seulp@263.net
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant No. 51375091).

摘要:

Based on the energy transfer model (ETM) proposed by Bao et al. and the Monte Carlo (MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model (MC-S) for squeeze-film damping (SQFD) in rarefied air by releasing the assumption of constant molecular velocity in the gap. Compared with the experiment data, the MC-S model is more efficient than the MC model and more accurate than ETM. Besides, by using the MC-S model, the feasibility of the empirical model proposed by Sumali for SQFD of different plate sizes is discussed. It is proved that, for various plate sizes, the accuracy of the empirical model is relatively high. At last, the SQFD of various vibration frequencies is discussed, and it shows that, for low vibration frequency, the MC-S model is reduced to ETM.

关键词: micro-electro-mechanical system (MEMS), squeeze-film air damping, rarefied air, molecular model

Abstract:

Based on the energy transfer model (ETM) proposed by Bao et al. and the Monte Carlo (MC) model proposed by Hutcherson and Ye, this paper proposes an efficient molecular model (MC-S) for squeeze-film damping (SQFD) in rarefied air by releasing the assumption of constant molecular velocity in the gap. Compared with the experiment data, the MC-S model is more efficient than the MC model and more accurate than ETM. Besides, by using the MC-S model, the feasibility of the empirical model proposed by Sumali for SQFD of different plate sizes is discussed. It is proved that, for various plate sizes, the accuracy of the empirical model is relatively high. At last, the SQFD of various vibration frequencies is discussed, and it shows that, for low vibration frequency, the MC-S model is reduced to ETM.

Key words: micro-electro-mechanical system (MEMS), squeeze-film air damping, rarefied air, molecular model

中图分类号:  (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

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47.45.Dt (Free molecular flows)