中国物理B ›› 2014, Vol. 23 ›› Issue (11): 118703-118703.doi: 10.1088/1674-1056/23/11/118703

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Development of MEMS-based micro capacitive tactile probe

雷李华a b, 李源b, 范国芳c, 吴俊杰b, 简黎b, 蔡潇雨b, 李同保a   

  1. a School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;
    b Shanghai Institute of Measurement and Testing Technology, National Center of Measurementand Testing for East China, National Center of Testing Technology, Shanghai 201203, China;
    c Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
  • 收稿日期:2014-04-25 修回日期:2014-06-16 出版日期:2014-11-15 发布日期:2014-11-15
  • 基金资助:

    Project supported by the Nano Special Projects of Shanghai Science and Technology Commission of China (Grant No. 11nm0560800) and the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 11104284).

Development of MEMS-based micro capacitive tactile probe

Lei Li-Hua (雷李华)a b, Li Yuan (李源)b, Fan Guo-Fang (范国芳)c, Wu Jun-Jie (吴俊杰)b, Jian Li (简黎)b, Cai Xiao-Yu (蔡潇雨)b, Li Tong-Bao (李同保)a   

  1. a School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;
    b Shanghai Institute of Measurement and Testing Technology, National Center of Measurementand Testing for East China, National Center of Testing Technology, Shanghai 201203, China;
    c Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
  • Received:2014-04-25 Revised:2014-06-16 Online:2014-11-15 Published:2014-11-15
  • Contact: Fan Guo-Fang E-mail:fanguofang@mail.ipc.ac.cn
  • Supported by:

    Project supported by the Nano Special Projects of Shanghai Science and Technology Commission of China (Grant No. 11nm0560800) and the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 11104284).

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摘要：

In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine (NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.

关键词: micro tactile probe, micro capacitive sensor, MEMS, nano measuring machine

Abstract:

In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine (NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.

Key words: micro tactile probe, micro capacitive sensor, MEMS, nano measuring machine

中图分类号:  (Nanotechnologies-design)

  • 87.85.Qr
87.85.Rs (Nanotechnologies-applications) 85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices) 87.85.Va (Micromachining)