中国物理B ›› 2022, Vol. 31 ›› Issue (1): 18506-018506.doi: 10.1088/1674-1056/ac1b95

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A novel low-loss four-bit bandpass filter using RF MEMS switches

Lulu Han(韩路路)1,2,3,4, Yu Wang(王宇)1,2,3,4, Qiannan Wu(吴倩楠)2,3,4,5,†, Shiyi Zhang(张世义)1,2,3,4, Shanshan Wang(王姗姗)1,2,3,4, and Mengwei Li(李孟委)1,2,3,4,‡   

  1. 1 School of Instrument and Electronics, North University of China, Taiyuan 030051, China;
    2 Nantong Institute of Intelligent Opto-Mechatronics, North University of China, Nantong 226000, China;
    3 Center for Microsystem Integration, North University of China, Taiyuan 030051, China;
    4 Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China;
    5 School of Science, North University of China, Taiyuan 030051, China
  • 收稿日期:2021-07-13 修回日期:2021-08-05 接受日期:2021-08-07 出版日期:2021-12-03 发布日期:2021-12-14
  • 通讯作者: Qiannan Wu, Mengwei Li E-mail:qiannanwoo@nuc.edu.cn;lmwnuc@163.com
  • 基金资助:
    Project supported by the National Defense Technology Industry Strong Foundation Project of China (Grant No. JCKY2018~* ~* ~*~*06) and the Information System New items Project (Grant Nos. 2018~*~*~*~*26 and 2019~*~*~*~*10). We thank the Key Laboratory of Instrumentation Science and Dynamic Measurement for their support.

A novel low-loss four-bit bandpass filter using RF MEMS switches

Lulu Han(韩路路)1,2,3,4, Yu Wang(王宇)1,2,3,4, Qiannan Wu(吴倩楠)2,3,4,5,†, Shiyi Zhang(张世义)1,2,3,4, Shanshan Wang(王姗姗)1,2,3,4, and Mengwei Li(李孟委)1,2,3,4,‡   

  1. 1 School of Instrument and Electronics, North University of China, Taiyuan 030051, China;
    2 Nantong Institute of Intelligent Opto-Mechatronics, North University of China, Nantong 226000, China;
    3 Center for Microsystem Integration, North University of China, Taiyuan 030051, China;
    4 Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China;
    5 School of Science, North University of China, Taiyuan 030051, China
  • Received:2021-07-13 Revised:2021-08-05 Accepted:2021-08-07 Online:2021-12-03 Published:2021-12-14
  • Contact: Qiannan Wu, Mengwei Li E-mail:qiannanwoo@nuc.edu.cn;lmwnuc@163.com
  • Supported by:
    Project supported by the National Defense Technology Industry Strong Foundation Project of China (Grant No. JCKY2018~* ~* ~*~*06) and the Information System New items Project (Grant Nos. 2018~*~*~*~*26 and 2019~*~*~*~*10). We thank the Key Laboratory of Instrumentation Science and Dynamic Measurement for their support.

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摘要： This paper details the design and simulation of a novel low-loss four-bit reconfigurable bandpass filter that integrates microelectromechanical system (MEMS) switches and comb resonators. A T-shaped reconfigurable resonator is reconfigured in a 'one resonator, multiple MEMS switches' configuration and used to gate the load capacitances of comb resonators so that a multiple-frequency filtering function is realized within the 7-16 GHz frequency range. In addition, the insertion loss of the filter is less than 1.99 dB, the out-of-band rejection is more than 18.30 dB, and the group delay is less than 0.25 ns. On the other hand, the size of this novel filter is only 4.4 mm×2.5 mm×0.4 mm. Our results indicate that this MEMS reconfigurable filter, which can switch 16 central frequency bands through eight switches, achieves a low insertion loss compared to those of traditional MEMS filters. In addition, the advantages of small size are obtained while achieving high integration.

关键词: four-bit, RF microelectromechanical system (MEMS) switch, reconfigurable filter, comb resonator

Abstract: This paper details the design and simulation of a novel low-loss four-bit reconfigurable bandpass filter that integrates microelectromechanical system (MEMS) switches and comb resonators. A T-shaped reconfigurable resonator is reconfigured in a 'one resonator, multiple MEMS switches' configuration and used to gate the load capacitances of comb resonators so that a multiple-frequency filtering function is realized within the 7-16 GHz frequency range. In addition, the insertion loss of the filter is less than 1.99 dB, the out-of-band rejection is more than 18.30 dB, and the group delay is less than 0.25 ns. On the other hand, the size of this novel filter is only 4.4 mm×2.5 mm×0.4 mm. Our results indicate that this MEMS reconfigurable filter, which can switch 16 central frequency bands through eight switches, achieves a low insertion loss compared to those of traditional MEMS filters. In addition, the advantages of small size are obtained while achieving high integration.

Key words: four-bit, RF microelectromechanical system (MEMS) switch, reconfigurable filter, comb resonator

中图分类号:  (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

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