中国物理B ›› 2007, Vol. 16 ›› Issue (4): 1105-1110.doi: 10.1088/1009-1963/16/4/041

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Nanocomposite TiC/a-C:H film prepared on titanium aluminium alloy substrates by PSII assistant MW-ECRCVD

马国佳1, 张华芳1, 武洪臣1, 彭丽平1, 刘喜亮2   

  1. (1)Beijing Aeronautical Manufacturing Technology Research Institute, Beijing 100024, China; (2)Harbin Engineering University, Harbin 150001, China
  • 收稿日期:2006-06-03 修回日期:2006-10-20 出版日期:2007-04-20 发布日期:2007-04-20
  • 基金资助:
    Project supported by the National Defence Key Laboratory Foundation of China (Grant No~51461070905ZS5003).

Nanocomposite TiC/a-C:H film prepared on titanium aluminium alloy substrates by PSII assistant MW-ECRCVD

Ma Guo-Jia(马国佳)a)†, Liu Xi-Liang(刘喜亮)b), Zhang Hua-Fang(张华芳)a), Wu Hong-Chen(武洪臣)a), and Peng Li-Ping(彭丽平)a)   

  1. a Beijing Aeronautical Manufacturing Technology Research Institute, Beijing 100024, China; b Harbin Engineering University, Harbin 150001, China
  • Received:2006-06-03 Revised:2006-10-20 Online:2007-04-20 Published:2007-04-20
  • Supported by:
    Project supported by the National Defence Key Laboratory Foundation of China (Grant No~51461070905ZS5003).

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摘要： Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and mechanical property were investigated. Using XPS and TEM, the films were identified to be a-C:H film containing TiC nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film. The hardness of a-C:H film with Ti is enhanced to 34 G Pa, while that of a-C:H film without Ti is about 12 G Pa, and the coherent strength is also obviously enhanced at the critical load of about 35N.

Abstract: Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and mechanical property were investigated. Using XPS and TEM, the films were identified to be a-C:H film containing TiC nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film. The hardness of a-C:H film with Ti is enhanced to 34 G Pa, while that of a-C:H film without Ti is about 12 G Pa, and the coherent strength is also obviously enhanced at the critical load of about 35N.

Key words: nanocomposite, TiC/a-C:H, diamond like carbon film, PSII

中图分类号:  (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

  • 81.15.Gh
68.55.-a (Thin film structure and morphology) 68.60.Bs (Mechanical and acoustical properties) 68.37.Lp (Transmission electron microscopy (TEM)) 61.46.-w (Structure of nanoscale materials) 61.05.cp (X-ray diffraction)