中国物理B ›› 2021, Vol. 30 ›› Issue (12): 126201-126201.doi: 10.1088/1674-1056/ac0524

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Synthesis of flower-like WS2 by chemical vapor deposition

Jin-Zi Ding(丁金姿)1, Wei Ren(任卫)2,†, Ai-Ling Feng(冯爱玲)1,‡, Yao Wang(王垚)2, Hao-Sen Qiao(乔浩森)2, Yu-Xin Jia(贾煜欣)2, Shuang-Xiong Ma(马双雄)2, and Bo-Yu Zhang(张博宇)2   

  1. 1 Institute of Physics & Optoelectronics Technology, Baoji University of Arts and Sciences, Baoji 721016, China;
    2 School of Science, Xi'an University of Posts & Telecommunications, Xi'an 710121, China
  • 收稿日期:2021-02-09 修回日期:2021-05-10 接受日期:2021-05-26 出版日期:2021-11-15 发布日期:2021-11-30
  • 通讯作者: Wei Ren, Ai-Ling Feng E-mail:renwei@xupt.edu.cn;ailing@mail.xjtu.edu.cn
  • 基金资助:
    Project supported by the Joint Research Funds of Department of Science & Technology of Shaanxi Province and Northwestern Polytechnical University (Grant No. 2020GXLH-Z-029).

Synthesis of flower-like WS2 by chemical vapor deposition

Jin-Zi Ding(丁金姿)1, Wei Ren(任卫)2,†, Ai-Ling Feng(冯爱玲)1,‡, Yao Wang(王垚)2, Hao-Sen Qiao(乔浩森)2, Yu-Xin Jia(贾煜欣)2, Shuang-Xiong Ma(马双雄)2, and Bo-Yu Zhang(张博宇)2   

  1. 1 Institute of Physics & Optoelectronics Technology, Baoji University of Arts and Sciences, Baoji 721016, China;
    2 School of Science, Xi'an University of Posts & Telecommunications, Xi'an 710121, China
  • Received:2021-02-09 Revised:2021-05-10 Accepted:2021-05-26 Online:2021-11-15 Published:2021-11-30
  • Contact: Wei Ren, Ai-Ling Feng E-mail:renwei@xupt.edu.cn;ailing@mail.xjtu.edu.cn
  • Supported by:
    Project supported by the Joint Research Funds of Department of Science & Technology of Shaanxi Province and Northwestern Polytechnical University (Grant No. 2020GXLH-Z-029).

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摘要： Flower-like tungsten disulfide (WS2) with a diameter of 5-10 μm is prepared by chemical vapor deposition (CVD). Scanning electron microscopy (SEM), energy dispersive spectrometer (EDS), Raman spectroscopy, and ultraviolet-visible (UV-vis) spectroscopy are used to characterize its morphological and optical properties, and its growth mechanism is discussed. The key factors for the formation of flower-like WS2 are determined. Firstly, the cooling process causes the generation of nucleation dislocations, and then the "leaf" growth of flower-like WS2 is achieved by increasing the temperature.

关键词: flower-like WS2, chemical vapor deposition (CVD), optical property, growth mechanism

Abstract: Flower-like tungsten disulfide (WS2) with a diameter of 5-10 μm is prepared by chemical vapor deposition (CVD). Scanning electron microscopy (SEM), energy dispersive spectrometer (EDS), Raman spectroscopy, and ultraviolet-visible (UV-vis) spectroscopy are used to characterize its morphological and optical properties, and its growth mechanism is discussed. The key factors for the formation of flower-like WS2 are determined. Firstly, the cooling process causes the generation of nucleation dislocations, and then the "leaf" growth of flower-like WS2 is achieved by increasing the temperature.

Key words: flower-like WS2, chemical vapor deposition (CVD), optical property, growth mechanism

中图分类号:  (Nanosheets)

  • 62.23.Kn
81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 68.55.-a (Thin film structure and morphology) 78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))