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Oxide-aperture-dependent output characteristics of circularly symmetric VCSEL structure |
| Wen-Yuan Liao(廖文渊)1,2, Jian Li(李健)3, Chuan-Chuan Li(李川川)2,3, Xiao-Feng Guo(郭小峰)1, Wen-Tao Guo(郭文涛)1, Wei-Hua Liu(刘维华)1,2, Yang-Jie Zhang(张杨杰)1,2, Xin Wei(韦欣)2,3, Man-Qing Tan(谭满清)1,2 |
1 State Key Laboratory of Integrated Optoelectronic, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China;
3 Laboratory of Nano-photoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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Abstract The influence of oxidation aperture on the output characteristics of the circularly symmetric vertical-cavity-surface-emitting laser (VCSEL) structure is investigated. To do so, VCSELs with different oxide aperture sizes are simulated by the finite-difference time-domain (FDTD) method. The relationships among the field distribution of mode superposition, mode wavelength, output spectra, and far-field divergence with different oxide apertures are obtained. Further, VCSELs respectively with oxide aperture sizes of 2.7 μm, 4.4 μm, 5.9 μm, 7 μm, 8 μm, 9 μm, and 18.7 μm are fabricated and characterized. The maximum output power increases from 2.4 mW to 5.7 mW with oxide aperture increasing from 5.9 μm to 9 μm. Meanwhile, the wavelength tuning rate decreases from 0.93 nm/mA to 0.375 nm/mA when the oxide aperture increases from 2.7 μm to 9 μm. The thermal resistance decreases from 2.815 ℃/mW to 1.015 ℃/mW when the oxide aperture increases from 4.4 μm to 18.7 μm. It is demonstrated theoretically and experimentally that the wavelength spacing between adjacent modes increases with the augment of the injection current and the spacing becomes smaller with the oxide aperture increasing. Thus it can be reported that the aperture size can effectively reduce the mode overlaying but at the cost of the power decreasing and the wavelength tuning rate and thermal resistance increasing.
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Received: 12 September 2019
Revised: 23 October 2019
Accepted manuscript online:
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PACS:
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42.55.Px
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(Semiconductor lasers; laser diodes)
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Corresponding Authors:
Man-Qing Tan
E-mail: mqtan@semi.ac.cn
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Cite this article:
Wen-Yuan Liao(廖文渊), Jian Li(李健), Chuan-Chuan Li(李川川), Xiao-Feng Guo(郭小峰), Wen-Tao Guo(郭文涛), Wei-Hua Liu(刘维华), Yang-Jie Zhang(张杨杰), Xin Wei(韦欣), Man-Qing Tan(谭满清) Oxide-aperture-dependent output characteristics of circularly symmetric VCSEL structure 2020 Chin. Phys. B 29 024201
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