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Chin. Phys. B, 2014, Vol. 23(3): 034208    DOI: 10.1088/1674-1056/23/3/034208
ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS Prev   Next  

UV–visible spectral characterization and density functional theory simulation analysis on laser-induced crystallization of amorphous silicon thin films

Huang Lu (黄璐)a, Jin Jing (金晶)a, Shi Wei-Min (史伟民)a, Yuan Zhi-Jun (袁志军)b, Yang Wei-Guang (杨伟光)a, Cao Ze-Chun (曹泽淳)a, Wang Lin-Jun (王林军)a, Zhou Jun (周军)b, Lou Qi-Hong (楼祺洪)b
a School of Material Science and Engineering, Shanghai University, Shanghai 200072, China;
b Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Novel Laser Technique and Application System Laboratory, Shanghai 201800, China
Abstract  The effect of laser energy density on the crystallization of hydrogenated intrinsic amorphous silicon (a-Si:H) thin films was studied both theoretically and experimentally. The thin films were irritated by a frequency-doubled (λ=532 nm) Nd:YAG pulsed nanosecond laser. An effective density functional theory model was built to reveal the variation of bandgap energy influenced by thermal stress after laser irradiation. Experimental results establish correlation between the thermal stress and the shift of transverse optical peak in Raman spectroscopy and suggest that the relatively greater shift of the transverse optical (TO) peak can produce higher stress. The highest crystalline fraction (84.5%) is obtained in the optimized laser energy density (1000 mJ/cm2) with a considerable stress release. The absorption edge energy measured by the UV-visible spectra is in fairly good agreement with the bandgap energy in the density functional theory (DFT) simulation.
Keywords:  laser crystallization      UV-visible spectra      density functional theory simulation  
Received:  28 May 2013      Revised:  22 August 2013      Accepted manuscript online: 
PACS:  42.62.-b (Laser applications)  
  78.40.-q (Absorption and reflection spectra: visible and ultraviolet)  
  31.15.es (Applications of density-functional theory (e.g., to electronic structure and stability; defect formation; dielectric properties, susceptibilities; viscoelastic coefficients; Rydberg transition frequencies))  
  81.40.Ef (Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization)  
Fund: Project supported by the Shanghai Leading Academic Disciplines, China (Grant No. S30107).
Corresponding Authors:  Huang Lu     E-mail:  huanglu@shu.edu.cn

Cite this article: 

Huang Lu (黄璐), Jin Jing (金晶), Shi Wei-Min (史伟民), Yuan Zhi-Jun (袁志军), Yang Wei-Guang (杨伟光), Cao Ze-Chun (曹泽淳), Wang Lin-Jun (王林军), Zhou Jun (周军), Lou Qi-Hong (楼祺洪) UV–visible spectral characterization and density functional theory simulation analysis on laser-induced crystallization of amorphous silicon thin films 2014 Chin. Phys. B 23 034208

[1] Fortunato G 1997 Thin Solid Films 296 82
[2] Mahan A H 2003 Sol. Energy Mater. Sol. Cells 78 299
[3] Brotherton S D 1995 Semicond. Sci. Technol. 10 721
[4] Izawa Y, Tokita S and Fujita M 2009 J. Appl. Phys. 105 064909
[5] Kamenev B V, Grebel H and Tsybeskov L 2006 Appl. Phys. Lett. 88 143117
[6] Wang D Q, Chen G R and Huang X F 2010 Acta Phys. Sin. 59 5681 (in Chinese)
[7] Tang Z X, Shen H L and Huan H B 2009 Thin Solid Films 517 5611
[8] Tao Y L, Zuo Y H and Zheng J 2012 Chin. Phys. B 21 077402
[9] Wu Y, Jing H and Ma K 2006 Chin. Phys. 15 1310
[10] Xu H J, Chan Y F and Su L 2011 Chin. Phys. B 20 107801
[11] Mudugamuwa N K, Dissanayake D M N M and Adikaari A A D T 2009 Sol. Energy Mater. Sol. Cells 93 549
[12] Park J H, Kim D Y and Ko J K 2003 Thin Solid Films 427 303
[13] Voutsas A T 2003 Appl. Surf. Sci. 208–209 250
[14] Chen Y R, Chang C H and Chao L S 2007 J. Cryst. Growth 303 199
[15] Rezek B, Nebel C E and Stutzmann M 2002 J. Appl. Phys. 91 4220
[16] Akito H, Fumiyo T and Michiko T 2002 Jpn. J. Appl. Phys. 41 311
[17] Dassow R, Kohler J R and Helen Y 2000 Semicond. Sci. Technol. 15 31
[18] Park S J, Ku Y M and Kim E H 2006 J. Non-Cryst. Solids 352 993
[19] Saboundji A, Mohammed B T and Andra G 2004 J. Non-Cryst Solids 338–340 758
[20] Yuan Z J, Lou Q H and Zhou J 2009 Opt. Laser Technol. 41 380
[21] Jin J, Yuan Z J and Huang L 2010 Appl. Surf. Sci. 256 3453
[22] Galdikas A, Mironas A and Senulienc D 1998 Thin Solid Films 323 275
[23] Shen Y, Tao J C and Gu F 2009 J. Alloys. Compd. 474 326
[24] Yamaguchi M, Ogihara C and Morigaki K 2003 Mater. Sci. Eng. B 97 135
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