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Chinese Physics, 2007, Vol. 16(4): 1150-1154    DOI: 10.1088/1009-1963/16/4/049
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Pressure effects in AlAs/InxGa1-xAs/GaAs resonant tunnelling diodes for application in micromachined sensors

Wang Jian(王建), Zhang Wen-Dong(张文栋), Xue Chen-Yang(薛晨阳), Xiong Ji-Jun(熊继军), Liu Jun(刘俊), and Xie Bin(谢斌)
National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan 030051, China
Abstract  This paper reports the current--voltage characteristics of [001]-oriented AlAs/InxGa1-xAs/GaAs resonant tunnelling diodes (RTDs) as a function of uniaxial external stress applied parallel to the [110] and the [1$\bar{1}$0] orientations, and the output characteristics of the GaAs pressure sensor based on the pressure effect on the RTDs. Under [110] stress, the resonance peak voltages of the RTDs shift to more positive voltages. For [1$\bar{1}$0] stress, the peaks shift toward more negative voltages. The resonance peak voltage is linearly dependent on the [110] and [1$\bar{1}$0] stresses and the linear sensitivities are up to 0.69mV/MPa, -0.69mV/MPa respectively. For the pressure sensor, the linear sensitivity is up to 0.37mV/kPa.
Keywords:  pressure effects      RTDs      micromachined sensors  
Received:  24 August 2006      Revised:  25 October 2006      Accepted manuscript online: 
PACS:  85.30.Mn (Junction breakdown and tunneling devices (including resonance tunneling devices))  
  85.30.Kk (Junction diodes)  
  85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)  
  07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)  
  47.80.Fg (Pressure and temperature measurements)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos 50405025 and 50375050).

Cite this article: 

Wang Jian(王建), Zhang Wen-Dong(张文栋), Xue Chen-Yang(薛晨阳), Xiong Ji-Jun(熊继军), Liu Jun(刘俊), and Xie Bin(谢斌) Pressure effects in AlAs/InxGa1-xAs/GaAs resonant tunnelling diodes for application in micromachined sensors 2007 Chinese Physics 16 1150

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