中国物理B ›› 2008, Vol. 17 ›› Issue (8): 3003-3007.doi: 10.1088/1674-1056/17/8/040
• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇 下一篇
Gnaser Hubert1, 苏卫锋2, 樊永良2, 蒋最敏2, 乐永康3
Su Wei-Feng(苏卫锋)a), Gnaser Hubert b)c), Fan Yong-Liang(樊永良)a), Jiang Zui-Min(蒋最敏)a), and Le Yong-Kang(乐永康)a)c)†
摘要: Titanium oxide films were prepared by annealing DC magnetron sputtered titanium films in an oxygen ambient. X-ray diffraction (XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ + }$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and atomic force microscopy (AFM) were employed, respectively, for the structural, compositional and morphological characterization of the obtained films. For temperatures below 875\,K, titanium films could not be fully oxidized within one hour. Above that temperature, the completely oxidized films were found to be rutile in structure. Detailed studies on the oxidation process at 925\,K were carried out for the understanding of the underlying mechanism of titanium dioxide (TiO$_{2})$ formation by thermal oxidation. It was demonstrated that the formation of crystalline TiO$_{2}$ could be divided into a short oxidation stage, followed by crystal forming stage. Relevance of this recognition was further discussed.
中图分类号: (Thin film structure and morphology)