中国物理B ›› 2008, Vol. 17 ›› Issue (8): 3003-3007.doi: 10.1088/1674-1056/17/8/040

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇    下一篇

Compositional and structural evolution of the titanium dioxide formation by thermal oxidation

Gnaser Hubert1, 苏卫锋2, 樊永良2, 蒋最敏2, 乐永康3   

  1. (1)Department of Physics, University of Kaiserslautern, D-67663 Kaiserslautern, Germany;IFOS, University of Kaiserslautern, D-67663 Kaiserslautern, Germany; (2)Surface Physics Laboratory, Department of Physics, Fudan University, Shanghai 200433, China; (3)Surface Physics Laboratory, Department of Physics, Fudan University, Shanghai 200433, China;IFOS, University of Kaiserslautern, D-67663 Kaiserslautern, Germany
  • 收稿日期:2007-11-20 修回日期:2007-12-21 出版日期:2008-08-20 发布日期:2008-08-20

Compositional and structural evolution of the titanium dioxide formation by thermal oxidation

Su Wei-Feng(苏卫锋)a), Gnaser Hubert b)c), Fan Yong-Liang(樊永良)a), Jiang Zui-Min(蒋最敏)a), and Le Yong-Kang(乐永康)a)c)†   

  1. a Surface Physics Laboratory, Department of Physics, Fudan University, Shanghai 200433, China; b Department of Physics, University of Kaiserslautern, D-67663 Kaiserslautern, Germany; c IFOS, University of Kaiserslautern, D-67663 Kaiserslautern, Germany
  • Received:2007-11-20 Revised:2007-12-21 Online:2008-08-20 Published:2008-08-20

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摘要： Titanium oxide films were prepared by annealing DC magnetron sputtered titanium films in an oxygen ambient. X-ray diffraction (XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ + }$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and atomic force microscopy (AFM) were employed, respectively, for the structural, compositional and morphological characterization of the obtained films. For temperatures below 875\,K, titanium films could not be fully oxidized within one hour. Above that temperature, the completely oxidized films were found to be rutile in structure. Detailed studies on the oxidation process at 925\,K were carried out for the understanding of the underlying mechanism of titanium dioxide (TiO$_{2})$ formation by thermal oxidation. It was demonstrated that the formation of crystalline TiO$_{2}$ could be divided into a short oxidation stage, followed by crystal forming stage. Relevance of this recognition was further discussed.

Abstract: Titanium oxide films were prepared by annealing DC magnetron sputtered titanium films in an oxygen ambient. X-ray diffraction (XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ + }$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and atomic force microscopy (AFM) were employed, respectively, for the structural, compositional and morphological characterization of the obtained films. For temperatures below 875 K, titanium films could not be fully oxidized within one hour. Above that temperature, the completely oxidized films were found to be rutile in structure. Detailed studies on the oxidation process at 925 K were carried out for the understanding of the underlying mechanism of titanium dioxide (TiO$_{2})$ formation by thermal oxidation. It was demonstrated that the formation of crystalline TiO$_{2}$ could be divided into a short oxidation stage, followed by crystal forming stage. Relevance of this recognition was further discussed.

Key words: thermal oxidation, titanium oxide, compositional and structural evolution

中图分类号:  (Thin film structure and morphology)

  • 68.55.-a
61.05.cp (X-ray diffraction) 68.37.Ps (Atomic force microscopy (AFM)) 79.20.Fv (Electron impact: Auger emission) 81.40.Ef (Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization)