中国物理B ›› 2005, Vol. 14 ›› Issue (3): 556-559.doi: 10.1088/1009-1963/14/3/023

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Effect of void formation during MEVVA tungsten ion implantation on the microstructure and surface properties of H13 die steel

杨建华1, 张通和2   

  1. (1)Department of Physics, Nantong University, Jiangsu 226007, China; Key Lab of ASIC Design, Nantong University, Jiangsu 226007, China; Radiation Beam and Materials Engineering Lab, Beijing Normal University, Beijing 100875, China; (2)Radiation Beam and Materials Engineering Lab, Beijing Normal University, Beijing 100875, China
  • 收稿日期:2004-07-15 修回日期:2004-09-06 出版日期:2005-03-02 发布日期:2005-03-02
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No 59671051) and Nantong University.

Effect of void formation during MEVVA tungsten ion implantation on the microstructure and surface properties of H13 die steel

Yang Jian-Hua (杨建华)abc, Zhang Tong-He (张通和)c   

  1. a Department of Physics, Nantong University, Jiangsu 226007, Chinab Key Lab of ASIC Design, Nantong University, Jiangsu 226007, Chinac Radiation Beam and Materials Engineering Lab, Beijing Normal University, Beijing 100875, China
  • Received:2004-07-15 Revised:2004-09-06 Online:2005-03-02 Published:2005-03-02
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No 59671051) and Nantong University.

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摘要： H13 die steel was implanted with tungsten using a metal vapour vacuum arc (MEVVA) ion source. When the pulsed beam current density of tungsten ions increased to 6mA?cm-2, some voids appeared in the high voltage electron microscope (HVEM) micrograph, which would disappear at an annealing temperature of 600℃. HVEM and x-ray diffraction were used for observing the phase structure of the annealed and un-annealed H13 steel after the steel was implanted. Results of wear and hardness tests indicated that whether the voids appear significantly influences the hardness and wear of H13 steel. Reasons for the formation of voids and the relation between the surface mechanical property and voids are discussed in terms of collision theory.

关键词: ion implantation, annealing, void, wear, MEVVA

Abstract: H13 die steel was implanted with tungsten using a metal vapour vacuum arc (MEVVA) ion source. When the pulsed beam current density of tungsten ions increased to 6mA$\cdot$cm-2, some voids appeared in the high voltage electron microscope (HVEM) micrograph, which would disappear at an annealing temperature of 600℃. HVEM and x-ray diffraction were used for observing the phase structure of the annealed and un-annealed H13 steel after the steel was implanted. Results of wear and hardness tests indicated that whether the voids appear significantly influences the hardness and wear of H13 steel. Reasons for the formation of voids and the relation between the surface mechanical property and voids are discussed in terms of collision theory.

Key words: ion implantation, annealing, void, wear, MEVVA

中图分类号:  (Microscopic defects (voids, inclusions, etc.))

  • 61.72.Qq
61.72.up (Other materials) 81.40.Pq (Friction, lubrication, and wear) 62.20.Qp (Friction, tribology, and hardness) 61.72.Cc (Kinetics of defect formation and annealing) 68.35.Gy (Mechanical properties; surface strains)