中国物理B ›› 2022, Vol. 31 ›› Issue (11): 114203-114203.doi: 10.1088/1674-1056/ac7c02

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Optical properties of He+-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides

Jia-Li You(游佳丽)1, Yu-Song Wang(王雨松)1, Tong Wang(王彤)1, Li-Li Fu(付丽丽)1, Qing-Yang Yue(岳庆炀)2, Xiang-Fu Wang(王祥夫)1, Rui-Lin Zheng(郑锐林)1, and Chun-Xiao Liu(刘春晓)1,3,†   

  1. 1 College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China;
    2 Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China;
    3 Jiangsu Province Engineering Research Center for Fabrication and Application of Special Optical Fiber Materials and Devices, Nanjing 210023, China
  • 收稿日期:2022-03-04 修回日期:2022-06-21 接受日期:2022-06-27 出版日期:2022-10-17 发布日期:2022-10-25
  • 通讯作者: Chun-Xiao Liu E-mail:chunxiaoliu@njupt.edu.cn
  • 基金资助:
    Project supported by the Postgraduate Research and Practice Innovation Program of Jiangsu Province, China (Grant No. SJCX21 0274), the National Natural Science Foundation of China (Grant Nos. 11405041 and 61905119), the Scientific Research Foundation for Youths Supported by Jiangxi Province Science Foundation, China (Grant No. 20192BAB217015), and the University Natural Science Research Project of Jiangsu Province, China (Grant No. 19KJB140013).

Optical properties of He+-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides

Jia-Li You(游佳丽)1, Yu-Song Wang(王雨松)1, Tong Wang(王彤)1, Li-Li Fu(付丽丽)1, Qing-Yang Yue(岳庆炀)2, Xiang-Fu Wang(王祥夫)1, Rui-Lin Zheng(郑锐林)1, and Chun-Xiao Liu(刘春晓)1,3,†   

  1. 1 College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China;
    2 Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China;
    3 Jiangsu Province Engineering Research Center for Fabrication and Application of Special Optical Fiber Materials and Devices, Nanjing 210023, China
  • Received:2022-03-04 Revised:2022-06-21 Accepted:2022-06-27 Online:2022-10-17 Published:2022-10-25
  • Contact: Chun-Xiao Liu E-mail:chunxiaoliu@njupt.edu.cn
  • Supported by:
    Project supported by the Postgraduate Research and Practice Innovation Program of Jiangsu Province, China (Grant No. SJCX21 0274), the National Natural Science Foundation of China (Grant Nos. 11405041 and 61905119), the Scientific Research Foundation for Youths Supported by Jiangxi Province Science Foundation, China (Grant No. 20192BAB217015), and the University Natural Science Research Project of Jiangsu Province, China (Grant No. 19KJB140013).

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摘要： Terbium gallium garnet (Tb3Ga5O12, TGG) crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect. In this work, 400-keV He+ ions with a fluence of 6.0×1016 ions/cm2 are irradiated into the TGG crystal for the planar waveguide formation. The precise diamond blade dicing with a rotation speed of 2×104 rpm and a cutting velocity of 0.1 mm/s is performed on the He+-implanted TGG planar waveguide for the ridge structure. The dark-mode spectrum of the He+-implanted TGG planar waveguide is measured by the prism-coupling method, thereby obtaining the relationship between the reflected light intensity and the effective refractive index. The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method. The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method. The He+-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices.

关键词: TGG crystal, optical waveguide, ion implantation, precise diamond blade dicing

Abstract: Terbium gallium garnet (Tb3Ga5O12, TGG) crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect. In this work, 400-keV He+ ions with a fluence of 6.0×1016 ions/cm2 are irradiated into the TGG crystal for the planar waveguide formation. The precise diamond blade dicing with a rotation speed of 2×104 rpm and a cutting velocity of 0.1 mm/s is performed on the He+-implanted TGG planar waveguide for the ridge structure. The dark-mode spectrum of the He+-implanted TGG planar waveguide is measured by the prism-coupling method, thereby obtaining the relationship between the reflected light intensity and the effective refractive index. The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method. The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method. The He+-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices.

Key words: TGG crystal, optical waveguide, ion implantation, precise diamond blade dicing

中图分类号:  (Optical waveguides and couplers)

  • 42.79.Gn
61.80.Jh (Ion radiation effects)