中国物理B ›› 1998, Vol. 7 ›› Issue (8): 623-627.doi: 10.1088/1004-423X/7/8/011

• • 上一篇    

LASER MOLECULAR BEAM EPITAXY SYSTEM AND ITS KEY TECHNOLOGIES

吕惠宾1, 杨国桢2, 周岳亮2, 陈正豪2, 雷震霖3   

  1. (1)Laboratory of Optical Physics, Institute of Physics, Academia Sinica, Beijing 100080, China; (2)Laboratory of Optical Physics, Institute of Physics, Academia Sinica, Beijing 100080, China; Centre for Condensed Matter Physics, Academia Sinica, Beijing 100080, China; (3)Shenyang Scientific Instrument Development Center, Academia Sinica, Shenyang 110003, China
  • 收稿日期:1998-04-27 修回日期:1998-05-27 出版日期:1998-08-20 发布日期:1998-08-20

LASER MOLECULAR BEAM EPITAXY SYSTEM AND ITS KEY TECHNOLOGIES

Yang Guo-zhen (杨国桢)ab,  Lü Hui-bin(吕惠宾)a, Zhou Yue-liang (周岳亮)ab, Lei Zhen-lin (雷震霖)c ，Chen Zheng-hao (陈正豪)ab   

  1. a Laboratory of Optical Physics, Institute of Physics, Academia Sinica, Beijing 100080, China; b Centre for Condensed Matter Physics, Academia Sinica, Beijing 100080, China; c Shenyang Scientific Instrument Development Center, Academia Sinica, Shenyang 110003, China
  • Received:1998-04-27 Revised:1998-05-27 Online:1998-08-20 Published:1998-08-20

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摘要： The laser molecular beam epitaxy system and its key technologies have been successfully developed in China. Atomically regulated unit-cell by unit-cell homoepitaxial SrTiO3 (STO) and heteroepitaxial BaTiO3 (BTO) films and STO/BTO superlattices were fabricated on STO (100) substrates by the laser molecular beam epitaxy. The fine streak patterns and more than 1000 cycles of undamping intensity oscillation were obtained by using in-situ reflection high-energy electron diffraction. The surfaces of films are atomically smooth.

Abstract: The laser molecular beam epitaxy system and its key technologies have been successfully developed in China. Atomically regulated unit-cell by unit-cell homoepitaxial SrTiO3 (STO) and heteroepitaxial BaTiO3 (BTO) films and STO/BTO superlattices were fabricated on STO (100) substrates by the laser molecular beam epitaxy. The fine streak patterns and more than 1000 cycles of undamping intensity oscillation were obtained by using in-situ reflection high-energy electron diffraction. The surfaces of films are atomically smooth.

中图分类号:  (Molecular, atomic, ion, and chemical beam epitaxy)

  • 81.15.Hi
68.55.A- (Nucleation and growth) 42.62.-b (Laser applications)