Preparation and characterization of thick cubic boron nitride films

doi:10.1088/1674-1056/23/6/066805

中国物理B ›› 2014, Vol. 23 ›› Issue (6): 66805-066805.doi: 10.1088/1674-1056/23/6/066805

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇下一篇

Preparation and characterization of thick cubic boron nitride films

王明娥^{a b}, 马国佳^{a b}, 董闯^a, 巩水利^b

a School of Material and Engineering, Dalian University of Technology, Dalian 116024, China;
b National Key Laboratory of Science and Technology on Power Beam Processes, Beijing AeronauticalManufacturing Technology Research Institute, Beijing 100024, China

收稿日期:2013-09-15 修回日期:2013-12-09 出版日期:2014-06-15 发布日期:2014-06-15

Preparation and characterization of thick cubic boron nitride films

Wang Ming-E (王明娥)^{a b}, Ma Guo-Jia (马国佳)^{a b}, Dong Chuang (董闯)^a, Gong Shui-Li (巩水利)^b

a School of Material and Engineering, Dalian University of Technology, Dalian 116024, China;
b National Key Laboratory of Science and Technology on Power Beam Processes, Beijing AeronauticalManufacturing Technology Research Institute, Beijing 100024, China

Received:2013-09-15 Revised:2013-12-09 Online:2014-06-15 Published:2014-06-15
Contact: Dong Chuang E-mail:dong@dlut.edu.cn

摘要/Abstract

摘要： Cubic boron nitride (c-BN) films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.

关键词: cubic BN films, B-C-N interlayer, stress, hardness

Abstract: Cubic boron nitride (c-BN) films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.

Key words: cubic BN films, B-C-N interlayer, stress, hardness

中图分类号: (Nucleation and growth)

68.55.A-

81.15.Hi (Molecular, atomic, ion, and chemical beam epitaxy) 68.35.B- (Structure of clean surfaces (and surface reconstruction))

王明娥, 马国佳, 董闯, 巩水利. Preparation and characterization of thick cubic boron nitride films[J]. 中国物理B, 2014, 23(6): 66805-066805.

Wang Ming-E (王明娥), Ma Guo-Jia (马国佳), Dong Chuang (董闯), Gong Shui-Li (巩水利). Preparation and characterization of thick cubic boron nitride films[J]. Chin. Phys. B, 2014, 23(6): 66805-066805.

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Preparation and characterization of thick cubic boron nitride films

Preparation and characterization of thick cubic boron nitride films

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